Modelling of a novel design of microfluidic based acoustic sensor

Rahman, Mohamad Faizal Abd; Arshad, Mohd Rizal; Manaf, Asrulnizam Abd; Yaacob, Mohd Ikhwan Hadi

doi:10.1109/rsm.2011.6088291

Cited by 5 publications

(3 citation statements)

References 8 publications

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“…The linear fit for pressure up, P U and pressure down, P D is obtained C U = 0.811P U + 12.08 (11) C D = 0.767P D + 12.18 (12) where C U is capacitance change for pressure up and C D is a capacitance change for pressure down. The regression R 2 values for increasing and decreasing pressure were 0.970 and 0.991 respectively.…”

Section: E Pressure Measurementmentioning

confidence: 99%

“…Many examples of such fluidic technology exist, including an inclinometer sensor that implements the electrical double layer principle capacitance (EDLC) to measure angle changes [11]. Other examples of fluidic applications are acoustical processes [12] and the detection of microdroplets [13] using a coplanar electrode design requiring two electrodes in one microchannel to generate capacitance.…”

Section: Introductionmentioning

confidence: 99%

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One-Side-Electrode-Type Fluidic-Based Capacitive Pressure Sensor

Nawi¹,

Manaf²,

Rahman³

et al. 2015

IEEE Sensors J.

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This paper presents the development of a novel one-side-electrode-type fluidic-based capacitive pressure sensor. A pressure sensor using a one-side-electrode and an implementation of electrical double layer capacitance concept was proposed. Mechanical analysis of the membrane was carried out using the finite-element analysis in terms of deflection and Mises stress. A sensor with a circular membrane radius of 3.2 mm, membrane thickness of 0.8 mm, microchannel thickness of 0.5 mm, and microchannel width of 0.5 mm was fabricated using polydimethylsiloxane. The validation was made between the analytical and experimental results for fluid mechanisms inside the sensor. This showed that the displacement for all types of liquid, including methanol, ethanol, and silicon oil was linearly aligned. Methanol was chosen as an electrolyte due to its liquid properties, such as low surface tension and dielectric permittivity. From the experimental results, the operating frequency, response time, and sensitivity of the sensor were 1.2 kHz, 0.12 s, and 0.77 pF/kPa, respectively. The effects of vibration, temperature, and lifetime were also discussed in this paper.Index Terms-Capacitive pressure sensor, electrical double layer, PDMS, electrolyte.

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Section: E Pressure Measurementmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

One-Side-Electrode-Type Fluidic-Based Capacitive Pressure Sensor

Nawi¹,

Manaf²,

Rahman³

et al. 2015

IEEE Sensors J.

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“…Also, it has advantages in terms of damping characteristics where it is greatly enhanced to the external forces and is able to sustain considerable shock. Microfluidic technology in devices development has been widely used for various types of sensor, including pressure sensors, flow sensors and temperature sensors [9,10]. Commonly used materials in microfluidic system are Polyimide(PI) and Polydimethylsiloxane (PDMS).…”

Section: Introductionmentioning

confidence: 99%

FEA Simulation of Fluidic Based Pressure Sensor for Differrent Shaped Membrane

Razak¹,

Nawi²,

Azeman³

et al. 2019

IJRTE

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In designing the fluidic based pressure sensor, the shape of the membrane is important in order to obtain maximum performance. The material used and the liquid inside the sensor is also important and deserve proper consideration. . In this work, the analysis of the membrane, materials and liquid using finite element analysis (FEA) are presented. The FEA simulation of the different shapes including square and rectangular shapes were carried out. The applied pressure and the dimension of selected membrane were varied in order to study the membrane performance.The result shows that the square shape produced the highest displacement of 4.7 mm compared to the other shapes. In terms of dimension, maximum performance can be achieved with a large area of membrane facing the applied pressure. The different types of membrane material andliquids that were used were also discussed. Two commonly used materials, Polyimide (PI) and Polydimethylsiloxane (PDMS) were chosen for this analysis. As for the liquids, methanol and propolyne carbonate were used.

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