2003
DOI: 10.1109/ted.2003.816910
|View full text |Cite
|
Sign up to set email alerts
|

Modeling the fringing electric field effect on the threshold voltage of FD SOI nMOS devices with the LDD/sidewall oxide spacer structure

Abstract: This paper presents analysis of the fringing electric field effect on the threshold voltage of fully depleted (FD) silicon-on-insulator nMOS devices with the lightly doped drain (LDD)/sidewall oxide spacer structure based on a closed-form analytical model derived from the two-dimensional (2-D) Poisson's equation and using the conformal mapping technique. Based on the analytical model, as verified by the experimental data and the 2-D simulation results, with a lower n-LDD doping density, the fringing electric f… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1
1

Citation Types

3
45
0

Year Published

2004
2004
2023
2023

Publication Types

Select...
6
2

Relationship

0
8

Authors

Journals

citations
Cited by 91 publications
(50 citation statements)
references
References 11 publications
3
45
0
Order By: Relevance
“…The Au Schottky barrier height is 0.7 eV for InGaAs and 0.8 eV for GaAs, resulting in a rather steep slope of energy bands at the surface of the top buffers [33, 34]. The band schemes of studied structures are pictured in Fig.…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…The Au Schottky barrier height is 0.7 eV for InGaAs and 0.8 eV for GaAs, resulting in a rather steep slope of energy bands at the surface of the top buffers [33, 34]. The band schemes of studied structures are pictured in Fig.…”
Section: Resultsmentioning
confidence: 99%
“…1, the vertical (in the growth direction) electrical contacts were made by defining circular mesas with 500 μm diameter and by etching of the n -InGaAs and n -GaAs buffers down to n + -layer in a solution of C 6 H 8 O 7 :H 2 O:H 2 O 2 (5:5:1) at 20 °C. Ohmic contacts were obtained by evaporating and annealing (at 400 °C for 1 min in nitrogen atmosphere) the Au 0.83 Ge 0.12 Ni 0.05 alloy [33, 34] on the bottom n + -InGaAs and n + -GaAs layers, respectively. Au top contacts were then evaporated with a diameter of 400 μm and a thickness of 70 nm.…”
Section: Methodsmentioning
confidence: 99%
“…1(a). C f is used to model the gate fringing field, it is the gate oxide capacitance with equivalent thickness of pt ox =2 [23].…”
Section: Surface Potential Near Sourcementioning
confidence: 99%
“…In order to concentrate on modeling the fringing electric field effect and to simplify the analysis, a conformal mapping technique is used [3]. The model assumes that ptype source and n-type drain regions are highly doped.…”
Section: Model Derivationmentioning
confidence: 99%
“…The potential model is analytically derived from the 2D Poisson equation. In the source region, we take account of the fringing field effect raised by the gate electrodes, and then apply the conformal mapping technique to simplify our analysis [3]. Finally, the model is examined by TCAD simulations.…”
Section: Introductionmentioning
confidence: 99%