Modeling and experimentation of a passive low frequency nanoforce sensor based on diamagnetic levitation

Abadie, Joël; Piat, Emmanuel; Oster, Stéphane; Boukallel, Mehdi

doi:10.1016/j.sna.2011.09.025

Cited by 48 publications

(40 citation statements)

References 30 publications

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“…As a result, a new generation of micro-sensors and actuators based on levitation have been demonstrated, covering a wide range of applications, e.g., as microinertial sensors [1]- [4], frictionless micro-bearings [5], [6], bistable switches [7], micro-accelerator [8], linear-micro-actuator [9], and nano-force sensor [10]. We will generally refer to all these devices as contactless suspensions (CS).…”

Section: Introductionmentioning

confidence: 99%

A New Hybrid Micromachined Contactless Suspension With Linear and Angular Positioning and Adjustable Dynamics

Poletkin

Wallrabe

et al. 2015

J. Microelectromech. Syst.

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In this letter, we present a new hybrid micromachined contactless suspension based on combining electromagnetic inductive and electrostatic actuation. In addition, the stiffness components are dynamically adjusted during the operation phase using a series of electrodes integrated in the contactless suspension structure. We experimentally demonstrate vertical linear positioning of a disk-shaped proof mass in a range from 30 to 200 µm, controlled tilting about two orthogonal axes in the horizontal plane ranges from ±1°to ±4°, as well as controlled oscillation about the vertical axis with an angular displacement of 37°a t a frequency of 1.5 Hz. In order to demonstrate dynamical adjustment of the stiffness, we experimentally show that the angular component of stiffness is increased by a factor of two at a levitation height of 100 µm. Therefore, the suspension dynamics can be changed and adapted to particular applications or to variations in operational environments. Moreover, we demonstrate that this device can operate as a bistable micro-actuator.[2015-0150] Index Terms-Levitation, contactless suspension, frictionless micro-bearings, inductive suspension, electrostatic suspension, bistable, 3D-micro-coils. 1057-7157

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Section: Introductionmentioning

confidence: 99%

A New Hybrid Micromachined Contactless Suspension With Linear and Angular Positioning and Adjustable Dynamics

Poletkin

Wallrabe

et al. 2015

J. Microelectromech. Syst.

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“…To perform these tasks, new instrumentation compatible with ART constraints and physicians' habits is necessary. With their low stiffness and their high ranges of force measurement, force sensors based on magnetic springs [23,24,25] could be a potential solution to design such instrumentation.…”

Section: Introductionmentioning

confidence: 99%

Experimental measurement of human oocyte mechanical properties on a micro and nanoforce sensing platform based on magnetic springs

Abadie

Roux

Piat

et al. 2014

Sensors and Actuators B: Chemical

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This article presents a new micro and nanoforce sensor used to perform a mechanical characterisation of human oocytes. This device is based on the use of low-stiffness magnetic springs. The oocytes to be characterised are placed on a force-sensitive platform. A manipulator equipped with a standard micropipette is used to mechanically compress the oocyte. Some complete "force-compression length" curves associated with mechanical load-unload cycles are given. These curves show the linear, the non-linear and also the plastic mechanical behaviour of the oocytes. These characterisations must be considered as a preliminary result which illustrates that the mechanical variability and the mechanical evolution of human oocytes during their maturation process can be observed with a force sensor based on magnetic springs.

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“…The magnet had an outer diameter of 3.175 mm and inner diameter of 1.588 mm [69,70]. The application of DLMA in nanoforce sensors was studied theoretically and experimentally by Abadie et al in [71], where the authors demonstrated a prototype of their sensor with a bandwidth of 4 Hz and a resolution of 5 nN.…”

Section: Diamagnetic Levitation Micro-actuatorsmentioning

confidence: 99%

Levitating Micro-Actuators: A Review

et al. 2018

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Through remote forces, levitating micro-actuators completely eliminate mechanical attachment between the stationary and moving parts of a micro-actuator, thus providing a fundamental solution to overcoming the domination of friction over inertial forces at the micro-scale. Eliminating the usual mechanical constraints promises micro-actuators with increased operational capabilities and low dissipation energy. Further reduction of friction and hence dissipation by means of vacuum leads to dramatic increases of performance when compared to mechanically tethered counterparts. In order to efficiently employ the benefits provided by levitation, micro-actuators are classified according to their physical principles as well as by their combinations. Different operating principles, structures, materials and fabrication methods are considered. A detailed analysis of the significant achievements in the technology of micro-optics, micro-magnets and micro-coil fabrication, along with the development of new magnetic materials during recent decades, which has driven the creation of new application domains for levitating micro-actuators is performed.

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Modeling and experimentation of a passive low frequency nanoforce sensor based on diamagnetic levitation

Cited by 48 publications

References 30 publications

A New Hybrid Micromachined Contactless Suspension With Linear and Angular Positioning and Adjustable Dynamics

A New Hybrid Micromachined Contactless Suspension With Linear and Angular Positioning and Adjustable Dynamics

Experimental measurement of human oocyte mechanical properties on a micro and nanoforce sensing platform based on magnetic springs

Levitating Micro-Actuators: A Review

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