Levitating Micro-Actuators: A Review

Poletkin, Kirill; Asadollahbaik, Asa; Kampmann, Ronald; Korvink, Jan G.

doi:10.3390/act7020017

Cited by 28 publications

(18 citation statements)

References 127 publications

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“…An electromagnetic actuator based on the Lorentz force principle is the core device of a magnetic levitation isolation platform, and it can eliminate the mechanical attachment between the stationary and moving parts of an actuator [1][2][3]. An actuator with high magnetic flux density, small volume and little hot loss is superior to others in obtaining suitable control performance.…”

Section: Introductionmentioning

confidence: 99%

Optimal Design of Magneto-Force-Thermal Parameters for Electromagnetic Actuators with Halbach Array

Liu

et al. 2021

Actuators

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A magnetic levitation isolation system applied for the active control of micro-vibration in space requires actuators with high accuracy, linear thrust and low power consumption. The magneto-force-thermal characteristics of traditional electromagnetic actuators are not optimal, while actuators with a Halbach array can converge magnetic induction lines and enhance the unilateral magnetic field. To improve the control effect, an accurate magnetic field analytical model is required. In this paper, a magnetic field analytical model of a non-equal-size Halbach array was established based on the equivalent magnetic charge method and the field strength superposition principle. Comparisons were conducted between numerical simulations and analytical results of the proposed model. The relationship between the magnetic flux density at the air gap and the size parameters of the Halbach array was analyzed by means of a finite element calculation. The mirror image method was adopted to consider the influence of the ferromagnetic boundary on the magnetic flux density. Finally, a parametric model of the non-equal-size Halbach actuator was established, and the multi-objective optimization design was carried out using a genetic algorithm. The actuator with optimized parameters was manufactured and experiments were conducted to verify the proposed analytical model. The difference between the experimental results and the analytical results is only 5%, which verifies the correctness of the magnetic field analytical model of the non-equal-size Halbach actuator.

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Section: Introductionmentioning

confidence: 99%

Optimal Design of Magneto-Force-Thermal Parameters for Electromagnetic Actuators with Halbach Array

Liu

et al. 2021

Actuators

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“…In particular, ELMA were successfully used as linear transporters [1] and in micro-inertial sensors [2,3]. MLAM can be further split into inductive (ILMA), diamagnetic (DLMA), superconducting micro-actuators and hybrid levitation micro-actuators (HLMA) [4], which have found applications in microbearings [5][6][7], micromirrors [8,9], micro-gyroscopes [10,11], micro-accelerometers [12], bistable switches [13], nanoforce sensors [14], microtransporters [15], microaccelerators [16], micromotors [17][18][19] and resonators [20].…”

Section: Introductionmentioning

confidence: 99%

“…HLMAs, in which, for instance, the inductive levitation micro-actuator system can be joined with a source of electrostatic field, dramatically increase the capabilities of levitated micro-systems [4] and demonstrate a wide range of different operation modes such as the linear and angular positioning, bi-stable linear and angular actuation and the adjustment of stiffness components, as it was reported in [17,23] and presented by the author at Transducers 2017 [24]. These capabilities open a new very promising perspective to create smart micro-actuator systems with new functional abilities implemented, for instance, by means of the coherent cooperation of distributed microactuators, multistable actuation, mechanical and electromagnetic couplings.…”

Section: Introductionmentioning

confidence: 99%

On the Static Pull-In of Tilting Actuation in Electromagnetically Levitating Hybrid Micro-Actuator: Theory and Experiment

Poletkin

2021

Actuators

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This work presents the results of the experimental and theoretical study of the static pull-in of tilting actuation executed by a hybrid levitation micro-actuator (HLMA) based on the combination of inductive levitation and electrostatic actuation. A semi-analytical model to study such a pull-in phenomenon is developed, for the first time, as a result of using the qualitative technique based on the Lagrangian approach to analyze inductive contactless suspensions and a recent progress in the calculation of mutual inductance and force between two circular filaments. The obtained non-linear model, accounting for two degrees of freedom of the actuator, allows us to predict accurately the static pull-in displacement and voltage. The results of modeling were verified experimentally and agree well with measurements.

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“…The magnetic levitation planar actuator, which can realise precise, non-contact and friction motion, is a promising substitute for the traditional electrical machine in modern high-performance industrial applications such as the micromachining [1][2][3], photolithography [4] and some scientific instruments [5]. Generally, the topology structure of magnetic levitation (maglev) actuators is varied due to the practical applications.…”

Section: Introductionmentioning

confidence: 99%

Optimisation method of magnetic levitation actuator for rotary table

Zheng

et al. 2020

IET Electric Power Applications

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This study presents a general optimisation method for determining the dimensions of the magnetic levitation (maglev) actuator for rotary tables. Combined with an improved electromagnetic numerical model of the maglev rotary tables, the optimal thickness dimensions of coils and magnets are obtained by the evolutionary optimisation algorithm. Different from the existing magnetic force model built by the harmonic analysis method, the improved numerical model involves the clearances of the neighbouring magnets in the circular magnet array and applies the numerical integration method to solve the complex Lorentz integrals. According to the evaluation function based on the numerical force model, the optimal thickness dimensions are determined via an evolutionary optimisation algorithm. By this method, the size of coils and magnets in the rotary table with the circular Halbach magnet array can be determined accurately and directly, rather than obtaining a single structure dimension by an analytical approach. In this work, the method is applied to optimise the dimensions of a maglev rotary table, and a prototype is manufactured according to the obtained optimal parameters. The experimental and simulation results verify the accuracy and validity of the proposed optimisation design method.

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Levitating Micro-Actuators: A Review

Cited by 28 publications

References 127 publications

Optimal Design of Magneto-Force-Thermal Parameters for Electromagnetic Actuators with Halbach Array

Optimal Design of Magneto-Force-Thermal Parameters for Electromagnetic Actuators with Halbach Array

On the Static Pull-In of Tilting Actuation in Electromagnetically Levitating Hybrid Micro-Actuator: Theory and Experiment

Optimisation method of magnetic levitation actuator for rotary table

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