Modal phase measuring deflectometry

Huang, Lei; Xue, Juan; Gao, Bo; McPherson, Chris; Beverage, Jake; Idir, Mourad

doi:10.1364/oe.24.024649

Cited by 81 publications

(23 citation statements)

References 29 publications

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“…However, interferometers are generally expensive and complicated, requiring careful environmental control. As a typical kind of delectometry, phase-measuring deflectometry (PMD) [1] with sinusoidal fringes [2][3][4] or binary pattern [5] has been developed for a decade for surface measurement from slopes or gradients. Particularly, software-configurable optical test system [6,7] based on PMD has been proposed for measuring large aspherical surfaces rapidly, robustly, 2 of 11 and accurately, similar to other kinds of image-based measurement methods [8].…”

Section: Introductionmentioning

confidence: 99%

Dynamic Deformation Measurement of Specular Surface with Deflectometry and Speckle Digital Image Correlation

Wang

Cheng

et al. 2020

Sensors

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The deformation measurement of a specular surface is of great importance during the quality inspection and installation of optical elements or wafers, especially those with large apertures. We propose a deflectometry method with speckle digital image correlation (DeSDIC) to realize the dynamic and high-accuracy measurement of the deformation on specular surfaces, with a simple system structure and robustness to noises and environmental vibrations. Random speckle pattern displayed on liquid crystal display is reflected by the original surface under test (SUT), and the distorted pattern is recorded by a camera. This originally distorted pattern is taken as the reference image, and the patterns captured afterwards are digitally correlated with the reference image to calculate the gradient change and deformation of the SUT. The theoretical relationships and an experimental one-step calibration scheme are proposed. Both static and dynamic deformations of a deformable mirror were experimentally measured to demonstrate the feasibility and accuracy of DeSDIC, which is comparable to phase-measuring deflectometry and interferometry.

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Section: Introductionmentioning

confidence: 99%

Dynamic Deformation Measurement of Specular Surface with Deflectometry and Speckle Digital Image Correlation

Wang

Cheng

et al. 2020

Sensors

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“…Song et al [32] selected a binary shifting strip as a structured light pattern for 3D reconstruction of the specular surface. Recently, Huang et al [33] have proposed a model phase measuring deflectometry technique that uses a mathematical method to reconstruct 3D shapes of specular objects.…”

Section: Introductionmentioning

confidence: 99%

A Calibration Method for System Parameters in Direct Phase Measuring Deflectometry

2019

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Phase measuring deflectometry has been widely studied as a way of obtaining the three-dimensional shape of specular objects. Recently, a new direct phase measuring deflectometry technique has been developed to measure the three-dimensional shape of specular objects that have discontinuous and/or isolated surfaces. However, accurate calibration of the system parameters is an important step in direct phase measuring deflectometry. This paper proposes a new calibration method that uses phase information to obtain the system parameters. Phase data are used to accurately calibrate the relative orientation of two liquid crystal display screens in a camera coordinate system, by generating and displaying horizontal and vertical sinusoidal fringe patterns on the two screens. The results of the experiments with an artificial specular step and a concave mirror showed that the proposed calibration method can build a highly accurate relationship between the absolute phase map and the depth data.

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“…However, calibration processes in dual-camera systems are complex. Recently, Huang et al [18] presented a method for simultaneous estimation of the height and the slopes of a surface under test in PMD based on use of a mathematical model and optimization of the orientation of the screen geometry after pre-calibration of the PMD system.…”

Section: Introductionmentioning

confidence: 99%

Performance analysis and evaluation of direct phase measuring deflectometry

Zhao

Gao

Zhang

et al. 2018

Optics and Lasers in Engineering

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Three-dimensional (3D) shape measurement of specular objects plays an important role in intelligent manufacturing applications. Phase measuring deflectometry (PMD)-based methods are widely used to obtain the 3D shapes of specular surfaces because they offer the advantages of a large dynamic range, high measurement accuracy, full-field and noncontact operation, and automatic data processing. To enable measurement of specular objects with discontinuous and/or isolated surfaces, a direct PMD (DPMD) method has been developed to build a direct relationship between phase and depth. In this paper, a new virtual measurement system is presented and is used to optimize the system parameters and evaluate the system's performance in DPMD applications. Four system parameters are analyzed to obtain accurate measurement results. Experiments are performed using simulated and actual data and the results confirm the effects of these four parameters on the measurement results. Researchers can therefore select suitable system parameters for actual DPMD (including PMD) measurement systems to obtain the 3D shapes of specular objects with high accuracy.

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Modal phase measuring deflectometry

Cited by 81 publications

References 29 publications

Dynamic Deformation Measurement of Specular Surface with Deflectometry and Speckle Digital Image Correlation

Dynamic Deformation Measurement of Specular Surface with Deflectometry and Speckle Digital Image Correlation

A Calibration Method for System Parameters in Direct Phase Measuring Deflectometry

Performance analysis and evaluation of direct phase measuring deflectometry

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