2006
DOI: 10.1364/josaa.23.002501
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Modal method in deep metal-dielectric gratings: the decisive role of hidden modes

Abstract: The modal method is well adapted for the modeling of deep-groove, high-contrast gratings of short period, possibly involving metal parts. Yet problems remain in the case of the TM polarization in the presence of metal parts in the corrugations: whereas most of the diffraction features are explained by the interplay of an astonishingly small number of true propagating and low-order evanescent modes, the exact solution of the diffraction problem requires the contribution of two types of evanescent modes that are… Show more

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Cited by 24 publications
(20 citation statements)
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“…Efficient numerical methods are needed to analyze the diffraction and scattering of light by these periodic structures. Existing numerical methods for diffraction gratings include general-purpose methods such as the finitedifference time-domain (FDTD) method and the finite element method (FEM) [3], and more special methods such as the analytic modal method [4][5][6][7], numerical modal methods [8][9][10][11][12][13][14][15][16][17][18], the boundary integral equation (BIE) methods [19][20][21][22][23][24][25][26][27][28], etc. Although FDTD and FEM are extremely versatile, they are typically less efficient than the special methods.…”
Section: Introductionmentioning
confidence: 99%
“…Efficient numerical methods are needed to analyze the diffraction and scattering of light by these periodic structures. Existing numerical methods for diffraction gratings include general-purpose methods such as the finitedifference time-domain (FDTD) method and the finite element method (FEM) [3], and more special methods such as the analytic modal method [4][5][6][7], numerical modal methods [8][9][10][11][12][13][14][15][16][17][18], the boundary integral equation (BIE) methods [19][20][21][22][23][24][25][26][27][28], etc. Although FDTD and FEM are extremely versatile, they are typically less efficient than the special methods.…”
Section: Introductionmentioning
confidence: 99%
“…Furthermore, multilayer structures allow the derivation of analytical formulas for their eigenmodes, and in several cases for their transmission and reflection properties as well. For our demonstration, we investigate a lossless configuration which has a single propagating mode with an antisymmetric profile and a negative mode index: or anomalous [22,26]. Fig.…”
mentioning
confidence: 99%
“…Using Lyndin's optimisation code [14] to model the phenomenologically designed structure gives a final structure which achieves the highest diffraction efficiency over the requested spectral width which is here 200 nm centred at 800 nm wavelength. The optimisation code uses a standard multivariate search procedure where the core of the code is a direct problem analysis based on the "true-mode method" [15]. This method forms the electromagnetic field from a basis of the modes of the corrugation, as the physical actuality, instead of decomposing the corrugation in to Fourier harmonics.…”
Section: -2mentioning
confidence: 99%