Miniaturized angular rate sensor with laminated quartz tuning fork

Uehara, Hiroshi; Ohtsuka, T.; Inoue, Takahiro; Yoshimatu, M.; Matudo, H.; Okazaki, M.; Dempa, N.

doi:10.1109/freq.2005.1574050

Cited by 7 publications

(4 citation statements)

References 2 publications

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“…Microelectromechanical systems (MEMS) sensors have been developed and applied to a variety of civil and military fields, such as MEMS mechanical gyroscope [1,2], quartz resonator [3], and micromachined inclinometer [4]. These sensors can measure accelerations, angles, displacements and positions in a moving system [5].…”

Section: Introductionmentioning

confidence: 99%

A liquid MEMS inclinometer sensor with improved sensitivity

Zhao

Zhang

et al. 2019

Sensors and Actuators A: Physical

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Section: Introductionmentioning

confidence: 99%

A liquid MEMS inclinometer sensor with improved sensitivity

Zhao

Zhang

et al. 2019

Sensors and Actuators A: Physical

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“…Therefore, many researchers are eager to develop approaches to reduce the difficulty of the fabrication process and to improve the sensors’ performance. For example, the Nihon Dempa Kogyo Company in Japan simplifies the sense electrodes on sidewalls by using two monolithic quartz wafers bonded with reverse electrical axes to each other [ 15 , 16 ]. Kenji Sato divides the structure into drive part and sense part to change the vibratory direction of sense mode.…”

Section: Introductionmentioning

confidence: 99%

A Z-axis Quartz Cross-fork Micromachined Gyroscope Based on Shear Stress Detection

Xie

et al. 2010

Sensors

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Here we propose a novel quartz micromachined gyroscope. The sensor has a simple cross-fork structure in the x-y plane of quartz crystal. Shear stress rather than normal stress is utilized to sense Coriolis’ force generated by the input angular rate signal. Compared to traditional quartz gyroscopes, which have two separate sense electrodes on each sidewall, there is only one electrode on each sidewall of the sense beam. As a result, the fabrication of the electrodes is simplified and the structure can be easily miniaturized. In order to increase sensitivity, a pair of proof masses is attached to the ends of the drive beam, and the sense beam has a tapered design. The structure is etched from a z-cut quartz wafer and the electrodes are realized by direct evaporation using the aperture mask method. The drive mode frequency of the prototype is 13.38 kHz, and the quality factor is approximately 1,000 in air. Therefore, the gyroscope can work properly without a vacuum package. The measurement ability of the shear stress detection design scheme is validated by the Coriolis’ force test. The performance of the sensor is characterized on a precision rate table using a specially designed readout circuit. The experimentally obtained scale factor is 1.45 mV/°/s and the nonlinearity is 3.6% in range of ±200 °/s.

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“…The intensity of and depend on the driving voltage, the piezoelectric properties, geometric shape, and size of the piezoelectrodes. The driving force and the driving torque can be expressed as [20][21][22][23] = ( …”

Section: Mathematical Modelsmentioning

confidence: 99%

Simulations and Experiments on the Vibrational Characteristics of Cylindrical Shell Resonator Actuated by Piezoelectric Electrodes with Different Thicknesses

Luo¹,

Qu²,

Zhang³

et al. 2017

Shock and Vibration

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The resonator is the key element of the Coriolis Vibratory Gyroscope (CVG). The vibrational characteristics of the resonator, including the resonant frequency, vibrational amplitude, and factor, have a great influence on CVG's performance. Among them, the vibrational amplitude mainly affects the scale factor and the signal-to-noise ratio, and the factor directly determines the precision and drift characteristics of the gyroscope. In this paper, a finite element model of a cylindrical shell resonator actuated by piezoelectric electrodes with different thicknesses is built to investigate the vibrational characteristics. The simulation results indicate that the resonant frequency barely changes with the electrode thickness, whereas the vibrational amplitude is inversely proportional to the electrode thickness under the same driving voltage. Experiments were performed with four resonators and piezoelectric electrodes of four sizes, and results were consistent with simulations. The resonant frequencies of four resonators changed within 0.36% after attaching the piezoelectric electrodes. Meanwhile, with the same driving voltage, it was shown that the vibrational amplitude decreased with the increase of electrode thickness. Moreover, thinner electrodes resulted in better factor and therefore better performance. This study may provide useful reference on electrode design of the CVGs.

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Miniaturized angular rate sensor with laminated quartz tuning fork

Abstract: We have developed a small surface mount type angular rate sensor (5.0x3.2x1.3mm) with a miniaturized quartz tuning fork sensor element (3.7x0.94x0.24mm) which was manufactured from a laminated quartz wafers. The miniaturized new sensor indicated the following results.

Cited by 7 publications

References 2 publications

A liquid MEMS inclinometer sensor with improved sensitivity

A liquid MEMS inclinometer sensor with improved sensitivity

A Z-axis Quartz Cross-fork Micromachined Gyroscope Based on Shear Stress Detection

Simulations and Experiments on the Vibrational Characteristics of Cylindrical Shell Resonator Actuated by Piezoelectric Electrodes with Different Thicknesses

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