A liquid MEMS inclinometer sensor with improved sensitivity

Xu, Hanyang; Zhao, Yulong; Zhang, Kai; Wang, Zixi; Jiang, Kyle

doi:10.1016/j.sna.2018.11.046

Cited by 8 publications

(4 citation statements)

References 27 publications

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“…Since the sensor was not placed on the horizontal plane, the output angle was not numerically equal to the input angle. The relationship between the input angle and the output angle was analyzed based on the projection of the droplet motion trajectory on the vertical plane [12]. The movement trajectory of the droplet in the sensor is mainly controlled by the annular groove on the intermediate substrate.…”

Section: Working Principlementioning

confidence: 99%

“…The minimum measurement angle of the MEMS liquid inclinometer sensor is mainly determined by the sliding angle of the metal droplet [12]. In order to further reduce the sliding angle of the droplet, researchers have proposed a method for growing microstructures on the surface of the substrate, which has increased the surface roughness of the substrate and reduced the contact area of the droplet and the surface [21,22].…”

Section: Design Of the Superhydrophobic Structure On Lower Structurementioning

confidence: 99%

“…Then, Xu proposed an improved liquid droplet inclinometer sensor, which increased the height of the channel. The droplet is only connected to the lower surface of the groove and can slide well under the action of gravity [12]. The range of measurement angle of the sensor was ±45 • and the resolution was 3.625 • .…”

Section: Introductionmentioning

confidence: 99%

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A Capacitive MEMS Inclinometer Sensor with Wide Dynamic Range and Improved Sensitivity

Zhao

Zhang

et al. 2020

Sensors

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This paper proposes a novel capacitive liquid metal microelectromechanical system (MEMS) inclinometer sensor and introduces its design, fabrication, and signal measurement. The sensor was constructed using three-layer substrates. A conductive liquid droplet was rolled along an annular groove of the intermediate substrate to reflect angular displacement, and capacitors were used to detect the position of the droplet. The numerical simulation work provides the working principle and structural design of the sensor, and the fabrication process of the sensor was proposed. Furthermore, the static capacitance test and the dynamic signal test were designed. The sensor had a wide measurement range from ±2.12° to ±360°, and the resolution of the sensor was 0.4°. This sensor further expands the measurement range of the previous liquid droplet MEMS inclinometer sensors.

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Section: Working Principlementioning

confidence: 99%

Section: Design Of the Superhydrophobic Structure On Lower Structurementioning

confidence: 99%

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A Capacitive MEMS Inclinometer Sensor with Wide Dynamic Range and Improved Sensitivity

Zhao

Zhang

et al. 2020

Sensors

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“…Liquid droplets have been wildly used as a component in many MEMS sensors and actuators, such as the droplet touch sensors reported by Kim in 2017 [1], the ferrofluid droplet actuators reported by Bijarchi in 2020 [2], and the angle droplet sensors provided by Xu in 2019 [3]. Such droplet sensors are considered to have advantages in high sensitivity and accuracy [4,5].…”

Section: Introductionmentioning

confidence: 99%

A Deformation of a Mercury Droplet under Acceleration in an Annular Groove

Zhao

Zhang

et al. 2020

Biosensors

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Microelectromechanical system (MEMS) liquid sensors may be used under large acceleration conditions. It is important to understand the deformation of the liquid droplets under acceleration for the design and applications of MEMS liquid sensors, as this will affect the performance of the sensors. This paper presents an investigation into the deformation of a mercury droplet in a liquid MEMS sensor under accelerations and reports the relationship between the deformation and the accelerations. The Laminar level set method was used in the numerical process. The geometric model consisted of a mercury droplet of 2 mm in diameter and an annular groove of 2.5 mm in width and 2.5 mm in height. The direction of the acceleration causing the droplet to deform is perpendicular to the direction of gravity. Fabrication and acceleration experiments were conducted. The deformation of the liquid was recorded using a high-speed camera. Both the simulation and experimental results show that the characteristic height of the droplets decreases as the acceleration increases. At an acceleration of 10 m/s2, the height of the droplet is reduced from 2 to 1.658 mm, and at 600 m/s2 the height is further reduced to 0.246 mm. The study finds that the droplet can deform into a flat shape but does not break even at 600 m/s2. Besides, the properties of the material in the domain surrounding the droplet and the contact angle also affect the deformation of the droplet. This work demonstrates the deformation of the liquid metal droplets under acceleration and provides the basis for the design of MEMS droplet acceleration sensors.

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The Liquid Metal Age: A Transition From Hg to Ga

Handschuh‐Wang,

Wang,

Gancarz

et al. 2024

Advanced Materials

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This review offers an illuminating journey through the historical evolution and modern‐day applications of liquid metals, presenting a comprehensive view of their significance in diverse fields. Tracing the trajectory from mercury applications to contemporary innovations, the paper explores their pivotal role in industry and research. The analysis spans electrical switches, mechanical applications, electrodes, chemical synthesis, energy storage, thermal transport, electronics, and biomedicine. Each section examines the intricacies of liquid metal integration, elucidating their contributions to technological advancements and societal progress. Moreover, the review critically appraises the challenges and prospects inherent in liquid metal applications, addressing issues of recycling, corrosion management, device stability, economic feasibility, translational hurdles, and market dynamics. By delving into these complexities, the paper advances scholarly understanding and offers actionable insights for researchers, engineers, and policymakers. It aims to catalyze innovation, foster interdisciplinary collaboration, and promote liquid metal‐enabled solutions for societal needs. Through its comprehensive analysis and forward‐looking perspective, this review serves as a guide for navigating the landscape of liquid metal applications, bridging historical legacies with contemporary challenges, and highlighting the transformative potential of liquid metals in shaping future technologies.

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A liquid MEMS inclinometer sensor with improved sensitivity

Cited by 8 publications

References 27 publications

A Capacitive MEMS Inclinometer Sensor with Wide Dynamic Range and Improved Sensitivity

A Capacitive MEMS Inclinometer Sensor with Wide Dynamic Range and Improved Sensitivity

A Deformation of a Mercury Droplet under Acceleration in an Annular Groove

The Liquid Metal Age: A Transition From Hg to Ga

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