Simulations and Experiments on the Vibrational Characteristics of Cylindrical Shell Resonator Actuated by Piezoelectric Electrodes with Different Thicknesses

Luo, Yong; Qu, Tianliang; Zhang, Bin; Pan, Yao; Peng, Xiao

doi:10.1155/2017/2314858

Cited by 9 publications

(7 citation statements)

References 10 publications

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“…However, the Q factor of PZT materials is much lower than that of fused silica, and therefore the overall Q factor of cylindrical fused silica resonators will decrease drastically when PZT lamination electrodes (thickness more than 200 μm , including the top and bottom metal electrodes and the middle PZT lamination) are attached. We also experimentally verified that thinner PZT lamination electrodes were more conducive to maintain the Q factor at a higher value 13 . Moreover, PZT lamination electrodes are usually attached to the resonator by epoxy resin adhesives, which will also reduce the Q factor of resonators and degrade the performance of the CRG 14 .…”

Section: Introductionmentioning

confidence: 59%

“…The electrostatic driving scheme has a sophisticated design with a high driving voltage (more than 100 V) 17 , resulting in an unsatisfactory driving efficiency. While the piezoelectric driving scheme has simplified mechanical structures and circuits, the Q factor of the resonators dropped dramatically after attaching PZT lamination electrodes 13 . Therefore, cylindrical shell resonators driven by PZT thin film electrodes were proposed and investigated through simulations and experiments in this paper, and the hypothesis that fused silica resonators can be driven effectively while maintaining a high Q factor after coating with PZT thin film electrodes was tested.…”

Section: Introductionmentioning

confidence: 99%

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Cylindrical Fused Silica Resonators Driven by PZT Thin Film Electrodes with Q Factor Achieving 2.89 Million after Coating

Luo

Cui

et al. 2019

Sci Rep

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Cylindrical shell fused silica resonators coated with 8 axisymmetric Pb(Zr 0.53 Ti 0.47 )O 3 (PZT) thin film electrodes (thickness ~2 μm ) were reported. The resonators were firstly designed and fabricated, then annealed and processed by chemical etching to increase mechanical quality factor (Q factor) of resonators, which achieved as high as 2.89 million for n = 2 wineglass modes after being coated with PZT thin film electrodes. The n = 2 wineglass modes of the resonators were driven by PZT thin film electrodes in experiment and simulation with fine vibratory shape, which demonstrated the feasibility of the cylindrical fused silica resonator driven by PZT thin film electrodes. The application of PZT thin film electrodes to drive and detect cylindrical shell fused silica resonator can significantly improve Q factor of resonators and improve the sensitivity of Coriolis Vibratory Gyroscope (CVG).

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Section: Introductionmentioning

confidence: 59%

Section: Introductionmentioning

confidence: 99%

Cylindrical Fused Silica Resonators Driven by PZT Thin Film Electrodes with Q Factor Achieving 2.89 Million after Coating

Luo

Cui

et al. 2019

Sci Rep

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“…The excitation direction and the low-frequency principal axis had already been aligned in the same orientation before the measurement. The diagram of the experimental setup is shown in Figure 3, and the testing procedure of the VCMs has been described in detail in [16,44,46]. aligned in the same orientation before the measurement.…”

Section: Vibrational Characteristics Without Electrostatic Influencementioning

confidence: 99%

Influence of Electrostatic Forces on the Vibrational Characteristics of Resonators for Coriolis Vibratory Gyroscopes

Peng

Qiu

Pan

et al. 2020

Sensors

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The Coriolis Vibratory Gyroscopes are a type of sensors that measure angular velocities through the Coriolis effect. The resonator is the critical component of the CVGs, the vibrational characteristics of which, including the resonant frequency, frequency mismatch, Q factor, and Q factor asymmetry, have a great influence on the performance of CVG. The frequency mismatch and Q factor of the resonator, in particular, directly determine the precision and drift characteristics of the gyroscope. Although the frequency mismatch and Q factor are natural properties of the resonator, they can change with external conditions, such as temperature, pressure, and external forces. In this paper, the influence of electrostatic forces on the vibrational characteristics of the fused silica cylindrical resonator is investigated. Experiments were performed on a fused silica cylindrical resonator coated with Cr/Au films. It was shown that the resonant frequency, frequency mismatch, and the decay time slightly decreased with electrostatic forces, while the decay time split increased. Lower capacitive gaps and larger applied voltages resulted in lower frequency mismatch and lower decay time. This phenomenon was theoretically analyzed, and the variation trends of results were consistent with the theoretical analysis. This study indicates that, for fused silica cylindrical resonator with electrostatic transduction, the electrostatic influence on the Q factor and frequency, although small, should be considered when designing the capacitive gap and choosing bias voltages.

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“…Coriolis vibratory gyroscopes (CVGs), especially those with axisymmetric shell resonators, have many advantages including high reliability, considerable stability, long life, low power consumption, and a maintenance-free concept, and are widely used in navigation fields and platform stabilization systems [1][2][3][4][5][6][7][8][9]. For this type of gyroscope, there are mainly two types of axisymmetric shell resonators-hemispherical shell resonators and cylindrical shell resonators [10].…”

Section: Introductionmentioning

confidence: 99%

Influence of Temperature Variation on the Vibrational Characteristics of Fused Silica Cylindrical Resonators for Coriolis Vibratory Gyroscopes

Peng¹,

Qiu²,

Luo³

et al. 2020

Sensors

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The fused silica cylindrical resonator is a type of axisymmetric resonator that can be used for Coriolis vibratory gyroscopes. Although the resonant frequency, frequency mismatch, and Q factor are natural properties of the resonator, they can change with temperature. Therefore, the temperature drift severely limits the detection accuracy and bias stability of the gyroscope. In this paper, the influence of temperature variation on the vibrational characteristics of fused silica cylindrical resonators was investigated. Experiments were performed on a fused silica cylindrical resonator coated with Cr/Au films. It was shown that at the temperature range from 253.15 K to 353.15 K, the resonant frequency linearly increased with temperature, the frequency mismatch remained unchanged, and the Q factor gradually increased till about 333.15 K, when it began to decrease. Meanwhile, the change of thermoelastic damping with temperature may dominate the variation of Q factor at the temperature range from 253.15 K to 353.15 K. This phenomenon was theoretically analyzed and the variation trends of results were consistent with the theoretical analysis. This study indicates that, for the fused silica cylindrical resonator, to discover the influence of temperature variation on the resonant frequency, frequency mismatch, and Q factor, there are certain rules to follow and repeat. The relationship between temperature and frequency can be established, which provides the feasibility of using self-calibration based on temperature characteristics of the resonator for temperature drift compensations. Additionally, there is an optimum temperature that may improve the performance of the Coriolis vibratory gyroscope with the fused silica cylindrical resonator.

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Simulations and Experiments on the Vibrational Characteristics of Cylindrical Shell Resonator Actuated by Piezoelectric Electrodes with Different Thicknesses

Cited by 9 publications

References 10 publications

Cylindrical Fused Silica Resonators Driven by PZT Thin Film Electrodes with Q Factor Achieving 2.89 Million after Coating

Cylindrical Fused Silica Resonators Driven by PZT Thin Film Electrodes with Q Factor Achieving 2.89 Million after Coating

Influence of Electrostatic Forces on the Vibrational Characteristics of Resonators for Coriolis Vibratory Gyroscopes

Influence of Temperature Variation on the Vibrational Characteristics of Fused Silica Cylindrical Resonators for Coriolis Vibratory Gyroscopes

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