2001
DOI: 10.1002/1521-3986(200101)41:1<45::aid-ctpp45>3.0.co;2-w
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Microwave Diagnostics of the Electron Density in Molecular Mixture Plasmas

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Cited by 8 publications
(15 citation statements)
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“…The values for the four different currents are given in table 2. The good agreement of the calculated temporal development and the measured behaviour for 2 mA, where the electron density from Gundermann et al [27] was used in the model, proved the validity of the used simple reaction scheme. Since the equilibrium concentration of CO depends only slightly on the electron density, the assumption of a fixed gas temperature would not seriously affect the results of the model.…”
Section: Results Of Modellingsupporting
confidence: 54%
See 1 more Smart Citation
“…The values for the four different currents are given in table 2. The good agreement of the calculated temporal development and the measured behaviour for 2 mA, where the electron density from Gundermann et al [27] was used in the model, proved the validity of the used simple reaction scheme. Since the equilibrium concentration of CO depends only slightly on the electron density, the assumption of a fixed gas temperature would not seriously affect the results of the model.…”
Section: Results Of Modellingsupporting
confidence: 54%
“…In figure 8, this value is shown as a dashed line to be compared with the summation of the measured concentrations Table 3. Rate equations and rate coefficients of electron impact dissociation, wall recombination and thermally activated chemical reactions used to model the chemical conversion of CO 2 (n, number of reacting species; n e , electron density) [26,27] of CO and CO 2 . The same density was used for the collision partner M in the calculation of the rate coefficients.…”
Section: Equilibriummentioning
confidence: 99%
“…MCRS measurements [21,22] have been used in other studies to determine the electron density in radio-frequency (RF) plasmas [23][24][25], discharge tubes [26,27] and recently in EUV-induced plasmas [19]. Since the method is already extensive described in these publications, we suffice with a brief description of the key concepts only.…”
mentioning
confidence: 99%
“…The electron density is measured with a non-intrusive method known as microwave cavity resonance spectroscopy (MCRS). The method has already been extensively applied to study various types of plasmas in other publications [8,9,[12][13][14][15][16][17]. Since MCRS is described in detail in these publications, we suffice with a brief summary here.…”
Section: Mcrs Set-upmentioning
confidence: 99%