Dynamics of the spatial electron density distribution of EUV-induced plasmas

Abstract

published version features the final layout of the paper including the volume, issue and page numbers. Link to publication General rightsCopyright and moral rights for the publications made accessible in the public portal are retained by the authors and/or other copyright owners and it is a condition of accessing publications that users recognise and abide by the legal requirements associated with these rights.• Users may download and print one copy of any publication from the public portal for the purpose of private study or research. • You may not further distribute the material or use it for any profit-making activity or commercial gain • You may freely distribute the URL identifying the publication in the public portal.If the publication is distributed under the terms of Article 25fa of the Dutch Copyright Act, indicated by the "Taverne" license above, please follow below link for the End User

EUV-Induced Plasma: A Peculiar Phenomenon of a Modern Lithographic Technology

“…where e and m e are the charge and mass of an electron, respectively, and ε 0 is the permittivity of vacuum. In practice, MCRS has been applied to EUV-induced plasmas by sending a pulsed EUV beam through a cavity that contained holes in its top and bottom cavity lids for this purpose (see Figure 5) [11,17,18,34,35,50]. Microwave (MW) antennas that are inserted through the cavity wall are used to send in microwave radiation and to record the cavity's response (either in transmission or reflection mode).…”

Energy distribution functions for ions from pulsed EUV-induced plasmas in low pressure N2-diluted H2 gas

“…[8][9][10] The density and the dynamics of one of the dominant plasma species in these plasmas, i.e., the electrons, have been investigated numerically 11,12 and experimentally by means of Langmuir probes 13 and temporally resolved Microwave Cavity Resonance Spectroscopy (MCRS) in low pressure argon [14][15][16] and hydrogen 16,17 environments. Double-mode MCRS 18 and multi-mode MCRS 19 have revealed this information on spatially resolved, while the combination of MCRS measurements and an ambipolar diffusion model showed that in the moderately high pressure regime (>3 Pa in argon 20 and >6 Pa in hydrogen 3 ), electrons thermalize to values close to room temperature in the temporal afterglow of these pulsed plasmas. 20 Especially of interest when studying the interaction of EUV-induced plasmas with plasma-facing surfaces are the total ion flux and the ion energy distribution functions (IEDFs) of the ionic compounds impinging upon the surface.…”

Numerical study of extreme-ultra-violet generated plasmas in hydrogen

“…e simulated evolution of the effective volume is non monotonic in time. A similar effect was observed in experiments via the ratio of the electron densities measured using 010 and 110 cavity modes [121]. However, in simulations, the decrease of the effective volume just aer the EUV pulse is caused by the convolution of the plasma density with the spatial profile of the microwave mode in the cavity.…”