2008
DOI: 10.1016/j.surfcoat.2008.02.014
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Microstructure and mechanical properties of Cr–Si–N coatings prepared by pulsed reactive dual magnetron sputtering

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Cited by 53 publications
(38 citation statements)
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“…Benkahoul et al [11] in which they demonstrated the increased hardness of CrSiN coatings when compared to the basic CrN coating. They showed that the maximum hardness (24 GPa) was attributed to solid solution hardening at a Si content of 2.3 at.%.…”
Section: Preliminary Study On the Effect Of Microstructure On The Spementioning
confidence: 98%
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“…Benkahoul et al [11] in which they demonstrated the increased hardness of CrSiN coatings when compared to the basic CrN coating. They showed that the maximum hardness (24 GPa) was attributed to solid solution hardening at a Si content of 2.3 at.%.…”
Section: Preliminary Study On the Effect Of Microstructure On The Spementioning
confidence: 98%
“…The base pressure of the reactor, described in detail in [11], was below 1 x 10 -6 Torr. Three different substrates were used: single crystal silicon (c-Si),…”
Section: Coating Depositionmentioning
confidence: 99%
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