2019
DOI: 10.1016/j.diamond.2019.107473
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Microstructural and tribological characterization of DLC coating by in-situ duplex plasma nitriding and arc ion plating

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Cited by 21 publications
(5 citation statements)
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“…Amorphous carbon films containing DLC films are synthesized by various methods such as chemical vapor deposition (CVD), which includes plasma-enhanced CVD [ 21 , 22 , 23 , 24 , 25 , 26 , 27 , 28 , 29 ], electron cyclotron resonance (ECR) plasma CVD [ 30 ], plasma-based ion implantation and deposition (PBII&D) [ 31 , 32 ], and physical vapor deposition, which includes ionized evaporation [ 33 ], sputtering [ 34 , 35 ], unbalanced magnetron sputtering (UBMS) [ 36 , 37 ], ECR sputtering [ 38 , 39 ], high-power impulse magnetron sputtering (HiPIMS) [ 40 , 41 ], filtered cathodic vacuum arc (FCVA) [ 42 , 43 , 44 , 45 ], ion-beam deposition (IBD) [ 5 , 46 , 47 , 48 ], arc ion plating (AIP) [ 49 , 50 ], pulsed laser deposition (PLD) [ 51 ], and laser arc deposition [ 52 , 53 ]. Many of the DLC films produced by these methods have deviated from the DLC regions on the ternary diagrams reported to date.…”
Section: Introductionmentioning
confidence: 99%
“…Amorphous carbon films containing DLC films are synthesized by various methods such as chemical vapor deposition (CVD), which includes plasma-enhanced CVD [ 21 , 22 , 23 , 24 , 25 , 26 , 27 , 28 , 29 ], electron cyclotron resonance (ECR) plasma CVD [ 30 ], plasma-based ion implantation and deposition (PBII&D) [ 31 , 32 ], and physical vapor deposition, which includes ionized evaporation [ 33 ], sputtering [ 34 , 35 ], unbalanced magnetron sputtering (UBMS) [ 36 , 37 ], ECR sputtering [ 38 , 39 ], high-power impulse magnetron sputtering (HiPIMS) [ 40 , 41 ], filtered cathodic vacuum arc (FCVA) [ 42 , 43 , 44 , 45 ], ion-beam deposition (IBD) [ 5 , 46 , 47 , 48 ], arc ion plating (AIP) [ 49 , 50 ], pulsed laser deposition (PLD) [ 51 ], and laser arc deposition [ 52 , 53 ]. Many of the DLC films produced by these methods have deviated from the DLC regions on the ternary diagrams reported to date.…”
Section: Introductionmentioning
confidence: 99%
“…The main characteristic of DLC is represented by the ratio between the sp3 and sp2 bonded carbon atoms and the hydrogen content. They can possess high hardness, low coefficients of friction against materials such as steel, and are chemically inert [3][4][5]. The adhesive strength may have superior bonding, which allows an increase of the tribological characteristics [6][7].…”
Section: Introductionmentioning
confidence: 99%
“…The Rockwell hardness test (VDI 3198) is often used to evaluate the adhesion of hard coatings to various materials [36][37][38][39][40]. In conformity with the VDI 3198, the adhesive strength quality HF1-HF4 defines strong interfacial adhesion and is usually applied in practice, whereas HF5 and HF6 define poor adhesion and are not acceptable [33].…”
Section: Adhesion Of A-c:h:sio X Filmsmentioning
confidence: 99%
“…The penetration in a relatively soft substrate surface is rather deep (~150 µm in our experiment), and plastic deformation causes the displacement of the substrate material, which induces spallation and microcracks of the crater edges even in hard coatings. To accomplish a smooth transition between the hard and soft substrates to alleviate the eggshell-like effect, the surface is preliminarily hardened for the improvement of its bearing capacity [37].…”
Section: Adhesion Of A-c:h:sio X Filmsmentioning
confidence: 99%