Microrobot System for Automatic Nanohandling Inside a Scanning Electron Microscope

Fatikow, Sergej; Wich, Thomas; Hulsen, H.; Sievers, Torsten; Jahnisch, M.

doi:10.1109/tmech.2007.897252

Cited by 88 publications

(14 citation statements)

References 11 publications

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“…So increased low-frequency disturbance rejection under highgain feedback (see (2) by a factor of 1 + αF 1 ) corresponds to an increased noise sensitivity by the same amount (see (3)). It is the aim of this paper to (ultimately) avoid such a trade-off.…”

Section: N-pid Control Designmentioning

confidence: 99%

“…Examples of such systems include the fast and nano-scale motion control of the stages in wafer scanners which are used in the manufacturing of integrated circuits, the positioning systems of storage drives like compact disk, digital versatile disk, blu-ray disk, and hard-disk drives, and the scanning stages of electron microscopes used for sub-micron imaging; see [1], [2], [3].…”

Section: Introductionmentioning

confidence: 99%

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Improved noise sensitivity under high-gain feedback in nano-positioning motion systems

Heertjes¹,

Leenknegt²,

Goch³

et al. 2009

2009 American Control Conference

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Section: N-pid Control Designmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Improved noise sensitivity under high-gain feedback in nano-positioning motion systems

Heertjes¹,

Leenknegt²,

Goch³

et al. 2009

2009 American Control Conference

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“…This configuration produces a compact design but can induce undesired vibration during dynamic positioning, and the fine motion range is typically limited to o2 μm. In addition to these stationary platforms, mobile nanomanipulators have also been developed [56][57][58][59] . Their actuation is typically based on the slip-stick principle 60 or the inchworm mobile mechanism 59 using piezoceramic actuators.…”

Section: Actuationmentioning

confidence: 99%

Recent advances in nanorobotic manipulation inside scanning electron microscopes

et al. 2016

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A scanning electron microscope (SEM) provides real-time imaging with nanometer resolution and a large scanning area, which enables the development and integration of robotic nanomanipulation systems inside a vacuum chamber to realize simultaneous imaging and direct interactions with nanoscaled samples. Emerging techniques for nanorobotic manipulation during SEM imaging enable the characterization of nanomaterials and nanostructures and the prototyping/assembly of nanodevices. This paper presents a comprehensive survey of recent advances in nanorobotic manipulation, including the development of nanomanipulation platforms, tools, changeable toolboxes, sensing units, control strategies, electron beam-induced deposition approaches, automation techniques, and nanomanipulation-enabled applications and discoveries. The limitations of the existing technologies and prospects for new technologies are also discussed.

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“…Visual feedback from SEM has a low sampling frequency [typically <15 frames per second (fps)]. This issue was previously addressed by selectively scanning a smaller region of interest [18], [19]. However, the method requires the installation of new hardware for accessing the scan controller of the SEM.…”

Section: E Visual Servo Control With a Feedforward Controllermentioning

confidence: 99%

“…To visually obtain the XY position of an end-effector, visual tracking of the end-effector in a sequence of SEM images has been implemented using feature-based methods [17], [18] or correlation-based methods [17], [19]. For example, a rigidmodel-based visual tracking method was reported, which applies domain-specific constraints and was evaluated by tracking a microgripper inside an SEM [19].…”

mentioning

confidence: 99%

Automated Four-Point Probe Measurement of Nanowires Inside a Scanning Electron Microscope

Zhang

Sun

et al. 2011

IEEE Trans. Nanotechnology

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Abstract-Nanomanipulation inside a scanning electron microscope (SEM) has been employed to maneuver and characterize nanomaterials. Despite recent efforts toward automated nanomanipulation, it is still largely conducted manually. In this paper, we demonstrate automated nanomanipulation inside an SEM for a well-structured nanomanipulation task via visual servo control and a vision-based contact-detection method using SEM as a vision sensor. Four-point probe measurement of individual nanowires is achieved automatically by controlling four nanomanipulators with SEM visual feedback. A feedforward controller is incorporated into the control system to improve response time. This technique represents an advance in nanomanipulation inside SEM and can be extended to other nanomanipulation tasks.

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Microrobot System for Automatic Nanohandling Inside a Scanning Electron Microscope

Cited by 88 publications

References 11 publications

Improved noise sensitivity under high-gain feedback in nano-positioning motion systems

Improved noise sensitivity under high-gain feedback in nano-positioning motion systems

Recent advances in nanorobotic manipulation inside scanning electron microscopes

Automated Four-Point Probe Measurement of Nanowires Inside a Scanning Electron Microscope

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