2014
DOI: 10.1016/j.nanoen.2013.12.007
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Micropower thermoelectric generator from thin Si membranes

Abstract: We report the development of a Si-based micro thermogenerator build from silicon-oninsulator by using standard CMOS processing. Ultrathin layers of Si, 100 nm in thickness, with embedded n and p-type doped regions electrically connected in series and thermally in parallel, are the active elements of the thermoelectric device that generate the thermopower under various thermal gradients. This proof-of-concept device produces an output power density of 4.5 µW/cm 2 under a temperature difference of 5 K across the… Show more

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Cited by 60 publications
(48 citation statements)
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References 19 publications
(30 reference statements)
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“…Independent values of σ and κ can be found in the Supplementary Figure 6 and Supplementary Note 3 and is compared with different literature values 17 , 21 , 22 , 24 26 . A remarkable decrease observed for both κ and σ is due to the trivial effect of a high porosity and tortuosity.…”
Section: Resultsmentioning
confidence: 96%
“…Independent values of σ and κ can be found in the Supplementary Figure 6 and Supplementary Note 3 and is compared with different literature values 17 , 21 , 22 , 24 26 . A remarkable decrease observed for both κ and σ is due to the trivial effect of a high porosity and tortuosity.…”
Section: Resultsmentioning
confidence: 96%
“…Second, by using low thermal conductivity materials like amorphous silicon nitride and bismuth telluride, the thermal link to the heat bath is severely reduced as compared to the use of polysilicon [11,12,14]. This leads to thermal conductance of the order of 10 −7 W.K −1 , supports a n or p-type Bi 2 XTe 3 thin films: the p-type (orange) is Bi 2−x Sb x Te 3 and the n-type (blue) is Bi 2−x Te 3 Se x .…”
Section: Introductionmentioning
confidence: 99%
“…A further step with this micro device is to fabricate a micro thermoelectric generator in which the active thermoelectric material is the thin silicon suspended membrane, which can be tuned from ntype to p-type with appropriate dopants. The first prototype of such generator (with a suspended membrane of 500 × 500 μm 2 ) gave a power output of 4.5 μW/cm 2 under a 5.5 K temperature difference, 44 and it is fully compatible with CMOS technologies. Similar silicon membranes were also studied with asynchronous optical sampling to investigate the decay times of the confined coherent phonons.…”
mentioning
confidence: 99%