Micromechanical precision pressure sensor incorporating SAW delay lines

Jungwirth, Mario; Scherr, H.; Weigel, Robert

doi:10.1007/bf01176911

Cited by 43 publications

(27 citation statements)

References 16 publications

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“…A change in temperature induces elongation/contractions in the IDT finger periodic and varies the SAW velocity and propagation length. Therefore, it should be removed either by integrating a temperature sensor and then subtracting the temperature effect from the entire gyro effect, or by using a compensation method like a difference of method (DOM) within the sensor itself [23]. To check the temperature effects, the temperature of the testing chamber was varied from 25 to 75 • C while the other parameters were kept constant during the testing period.…”

Section: Thermal-related Testsmentioning

confidence: 99%

Development of wireless, batteryfree gyroscope based on one-port SAW delay line and double resonant antenna

Elmazria

Sarry

et al. 2014

Sensors and Actuators A: Physical

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International audienceA wireless, battery-free micro-gyroscope was developed by employing a one-port surface acoustic wave (SAW) reflective delay line, a SAW resonator, and an antenna. Two SAW devices with different center frequencies were simultaneously activated by a single antenna with double resonant frequencies. An 80 MHz RF energy from antenna activates a double-port SAW resonator while a 195 MHz RF energy activates a one-port SAW delay line. The fabricated gyroscope showed clear reflection peaks with high signal-to-noise (S/N) ratios in both the time and frequency domains in measurement system during wireless testing. Upon rotation of the device, large shifts of the reflection peaks were observed owing to a secondary wave interference effect caused by the Coriolis force that depends on the spinning rate. The measured sensitivity and linearity of the developed gyroscope were, respectively, 1.35 deg/(deg/s) and 0.91, which are promising values for our targeted applications. The temperature, metal mass effect, and vibration/shock effects were also studied and the results are discussed

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Section: Thermal-related Testsmentioning

confidence: 99%

Development of wireless, batteryfree gyroscope based on one-port SAW delay line and double resonant antenna

Elmazria

Sarry

et al. 2014

Sensors and Actuators A: Physical

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“…5 includes the gas and temperature information. To compensate the temperature effect, we used the method of difference [6],…”

Section: Idtsmentioning

confidence: 99%

Development of a New Wireless Chemical Sensor for CO<inf>2</inf> detection

et al. 2007

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We developed a 440MHz surface acoustic wave wireless gas senor for CO 2 detection and wireless measurement system. The sensor consists of a SAW reflective delay line structured by single phase unidirectional transducers (SPUDTs) and three shorted grating reflectors, and a Teflon AF 2400 thin film sensitive to CO 2 gas deposited onto substrate between reflectors. The fabricated SAW device was wirelessly characterized by network analyzer. Adsorption of CO 2 gas onto the sensitive film induced a large phase shifts of the reflection peaks depending on the CO 2 concentration. The obtained sensitivity was 1.98 o /ppm.

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“…They are characterized by small size and high sensitivity to external physical parameters and from the properties of the film deposited on the SAW substrate; thus, they rapidly react to changes in environmental conditions [5]. SAW devices based on a micro force sensor have been developed using many different piezoelectric materials, such as quartz, LiNbO 3 , and LiTaO 3 .…”

Section: Introductionmentioning

confidence: 99%

Finite element analysis of surface acoustic wave based on a micro force sensor

Chen

et al. 2015

Measurement

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Micromechanical precision pressure sensor incorporating SAW delay lines

Cited by 43 publications

References 16 publications

Development of wireless, batteryfree gyroscope based on one-port SAW delay line and double resonant antenna

Development of wireless, batteryfree gyroscope based on one-port SAW delay line and double resonant antenna

Development of a New Wireless Chemical Sensor for CO<inf>2</inf> detection

Finite element analysis of surface acoustic wave based on a micro force sensor

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