Micromachining of magnetic materials

Kruusing, Arvi; Leppävuori, S.; Uusimäki, A.; Petrėtis, Bronius; Макарова, О. В.

doi:10.1016/s0924-4247(98)00343-4

Cited by 36 publications

(21 citation statements)

References 9 publications

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“…This implies that materials in which photochemical ablation process is the dominant ablation process are the ones mostly favored for patterns and micromachining applications (Tseng 2004). As the behavior of materials to ablation process differ according to their mechanical and chemical properties, for some magnetic materials where the ablation cause large debris formation due to the nature of the materials, micromachining under water by short-pulsed laser provides clean grooves while machining in air results in grooves filled with molten material (Kruusing 1999;Kruusing 2004). …”

Section: Underwater Laser Micromachining Figure 13 Micromachining Undmentioning

confidence: 99%

“…Water is sometimes used as the ambient environment due to the fact that it eliminates the debris re-deposition over the substrate (Kruusing 2004). Decrease in etching rate for underwater micromachining may happen due to lower number of pulses, accumulation of debris, destruction of oxide layer and reduction in transparency of the liquid (water) (Kruusing 1999). Similar differences have been observed for comparisons of underwater, gases and air (Kruusing 2004).…”

Section: Excimer Laser 2d/3d Patterningmentioning

confidence: 99%

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Micromachining of polyurethane (PU) polymer using a KrF excimer laser (248nm)

Singh

Sharma

2014

Applied Surface Science

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SUMMARYPolyurethane (PU) polymer, a thermoplastic material, melts when exposed to laser light due to a variety of primary and secondary structures. Pattern and/or inducing a significant chemical change of the surface of polyurethane impacts a number of technologies, such as tissue engineering, MEMS devices, semiconductor manufacturing.At present, polyurethane (PU) is considered to be a best compromise material available, in terms of biocompatibility, mechanical flexibility and strength. Excimer laser micromachining is an appropriate tool for an alternative approach to conventional machining. It is highly desirable to relate the material removal rate with etch rate and ablation depth for understanding the ablation dynamics. In this investigation, micromachining of polyurethane polymer is conducted using a short pulse (FWHM = 25 ns) KrF Excimer Laser (248 nm wavelength) that generates laser energy in the range of 100 to 650 mJ. The machined surfaces were examined using conventional optical microscopy, surface profilometer and laser interference optical microscope (MicroXAM).The influence of the operating parameters, such as input energy, number of pulses, and environment on resulting micromachined geometries is also studied. Simple as well as complex geometries, such as micro-fluidic channels, micro-gears, part geometries used in medical applications, and electrical circuits were micromachined.iii ACKNOWLEDGMENTS

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Section: Underwater Laser Micromachining Figure 13 Micromachining Undmentioning

confidence: 99%

Section: Excimer Laser 2d/3d Patterningmentioning

confidence: 99%

Micromachining of polyurethane (PU) polymer using a KrF excimer laser (248nm)

Singh

Sharma

2014

Applied Surface Science

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“…Laser ablation is a rapid and non-contact method of patterning [14] and cutting [15] ferrite materials, making it an attractive method for micromachining planar ferrite cores of arbitrary geometry. In particular, E-cores are a promising option for replacing the bobbin cores used in previous work, as they are simple to machine from planar sheets of ferrite, allow for precise control of inductance, and enable good magnetic coupling between windings.…”

Section: A Magnetic Componentsmentioning

confidence: 99%

Design and fabrication of ultralight high-voltage power circuits for flapping-wing robotic insects

Karpelson

Whitney

Wei

et al. 2011

2011 Twenty-Sixth Annual IEEE Applied Power Electronics Conference and Exposition (APEC)

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Abstract-Flapping-wing robotic insects are small, highly maneuverable flying robots inspired by biological insects and useful for a wide range of tasks, including exploration, environmental monitoring, search and rescue, and surveillance. Recently, robotic insects driven by piezoelectric actuators have achieved the important goal of taking off with external power; however, fully autonomous operation requires an ultralight power supply capable of generating high-voltage drive signals from low-voltage energy sources. This paper describes high-voltage switching circuit topologies and control methods suitable for driving piezoelectric actuators in flapping-wing robotic insects and discusses the physical implementation of these topologies, including the fabrication of custom magnetic components by laser micromachining and other weight minimization techniques. The performance of laser micromachined magnetics and custom-wound commercial magnetics is compared through the experimental realization of a tapped inductor boost converter capable of stepping up a 3.7V Li-poly cell input to 200V. The potential of laser micromachined magnetics is further shown by implementing a similar converter weighing 20mg (not including control functionality) and capable of up to 70mW output at 200V and up to 100mW at 100V.

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“…Kruusing et al used Nd:YAG lasers to cut out magnetic ceramics NdFeB and MnZn ferrites. [29] Cut sizes ranged from 30±50 lm. Oliveira et al observed the formation of very small columns while ablating Al 2 O 3 ceramics with a KrF excimer laser.…”

Section: Laser-based Direct Writingmentioning

confidence: 99%

Powder‐Based Ceramic Meso‐ and Microscale Fabrication Processes

Heule¹,

Vuillemin

Gauckler

2003

Advanced Materials

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Processing techniques are reviewed that allow the introduction of ceramic components made from powders into microelectromechanical systems (MEMS). Ceramics have several advantages over other materials also in microsystems, e.g., heat resistance, hardness, corrosion resistivity, or functional properties. The range of available materials in microfabrication technology is being increased beyond those deposited by thin‐film technology. Top–down approaches like mechanical and laser‐based direct writing processes, ink‐jet printing, microextrusion, and lithography‐based methods are presented. They are complemented by some more fundamental work in the field of bottom–up synthesis of micro‐ and nanoscaled ceramic materials.

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Micromachining of magnetic materials

Cited by 36 publications

References 9 publications

Micromachining of polyurethane (PU) polymer using a KrF excimer laser (248nm)

Micromachining of polyurethane (PU) polymer using a KrF excimer laser (248nm)

Design and fabrication of ultralight high-voltage power circuits for flapping-wing robotic insects

Powder‐Based Ceramic Meso‐ and Microscale Fabrication Processes

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