AbstractÀMiniaturization of chemical processes is becoming a must for green chemistry and sustainable industry processes, so technological research in this direction is well received. Continuous microreactor systems hold many potential benefits over batch reactors, in that they allow: high surface-to-volume ratio, fine adjustment of chemical reaction residence times, small thermal inertia, and fast changes in temperature. Advantages of multilayer green ceramics for microprocess applications include: that the LTCC substrate is chemically inert to most solvents, that it has a high contact angle, that it presents low thermal coefficient of expansion, and that it can withstand high operational temperatures and high internal pressures. For these reasons, LTCC-based microsystem technologies allow the implementation of different unitary operations for chemical processes, making it an enabling technology for the miniaturization of chemical processes. In fact, recently, LTCC microfluidic reactors have been used to produce microparticles and nanoparticles with excellent control of size distribution and morphology. The present work provides a report on the performance of a 3D LTCC coaxial flow focusing microfluidic reactor designed to fabricate microparticles and nanoparticles using nanoprecipitation through an antisolvent; with electric potential size tuning. We also implement an approach to particle production scale-out.