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2021
DOI: 10.3390/s21051710
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Microfluidic Modules Integrated with Microwave Components—Overview of Applications from the Perspective of Different Manufacturing Technologies

Abstract: The constant increase in the number of microfluidic-microwave devices can be explained by various advantages, such as relatively easy integration of various microwave circuits in the device, which contains microfluidic components. To achieve the aforementioned solutions, four trends of manufacturing appear—manufacturing based on epoxy-glass laminates, polymer materials (mostly common in use are polydimethylsiloxane (PDMS) and polymethyl 2-methylpropenoate (PMMA)), glass/silicon substrates, and Low-Temperature … Show more

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Cited by 13 publications
(8 citation statements)
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References 108 publications
(148 reference statements)
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“…Owing to their encapsulating features, this technology is also extensively used to hermetically seal sensitive components such as RF-MEMS [133], [134] and for monolithic microfluidic devices [135], [136].…”
Section: B Resonators Filters and Phase Shiftersmentioning
confidence: 99%
“…Owing to their encapsulating features, this technology is also extensively used to hermetically seal sensitive components such as RF-MEMS [133], [134] and for monolithic microfluidic devices [135], [136].…”
Section: B Resonators Filters and Phase Shiftersmentioning
confidence: 99%
“…Furthermore, if no physical contact with a heating element is required, unique vessel geometries and materials become feasible, enabling more flexible device design. 21 One particularly exciting method of contact-free heating is microwave irradiation (i.e., dielectric heating). In contrast to proximity-based heaters, microwaves heat via direct interaction with dipolar molecules and thus can pass through vessel walls.…”
Section: Introductionmentioning
confidence: 99%
“…Furthermore, if no physical contact with a heating element is required, unique vessel geometries and materials become feasible, enabling more flexible device design. 21 One particularly exciting method of contact-free heating is microwave irradiation ( i.e. , dielectric heating).…”
Section: Introductionmentioning
confidence: 99%
“…A review of digital microfluidic devices was presented by Shiyu Chen et al [ 2 ]. Jasińska and Malecha described the proposed microfluidic modules with integrated microwave components [ 3 ].…”
Section: Introductionmentioning
confidence: 99%