Microcrystalline silicon–germanium alloys for solar cell application: Growth and material properties

Matsui, Takuya; Ogata, K.; Isomura, Masao; Kondo, Michio

doi:10.1016/j.jnoncrysol.2005.11.144

Cited by 39 publications

(29 citation statements)

References 6 publications

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“…This approach makes it possible to significantly reduce the amount of the semiconductor material in the finished product, as compared with the production of conventional waferbased cells [2]. Thin-film silicon-based solar cells are commonly fabricated using plasma-enhanced chemical vapor deposition, electron beam evaporation, hot filament-assisted deposition, magnetron sputtering, and some other approaches that are compatible with the present-day microelectronic manufacturing processes [3][4][5][6]. These approaches are rapidly gaining momentum with the continuously increasing use of nanostructured materials to enhance solar cell performance [7][8][9][10][11].…”

Section: Introductionmentioning

confidence: 99%

Surface Plasmon Enhancement of Optical Absorption in Thin-Film Silicon Solar Cells

2009

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Strong electromagnetic field enhancement that occurs under conditions of the surface plasmon excitation in metallic nanoparticles deposited on a semiconductor surface is a very efficient and promising tool for increasing the optical absorption within semiconductor solar cells and, hence, their photocurrent response. The enhancement of the optical absorption in thin-film silicon solar cells via the excitation of localized surface plasmons in spherical silver nanoparticles is investigated. Using the effective medium model, the effect of the nanoparticle size and the surface coverage on that enhancement is analyzed. The optimum configuration and the nanoparticle parameters leading to the maximum enhancement in the optical absorption and the photocurrent response in a single p-n junction silicon cell are obtained. The effect of coupling between the silicon layer and the surface plasmon fields on the efficiency of the above enhancement is quantified as well.

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Section: Introductionmentioning

confidence: 99%

Surface Plasmon Enhancement of Optical Absorption in Thin-Film Silicon Solar Cells

2009

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“…Matsui et al [51], studied the Ge fraction as a function of GeH 4 concentration in the gas phase, defined as […”

Section: Hydrogenatedmentioning

confidence: 99%

Transport properties of nanocrystalline silicon and silicon–germanium

Saripalli

Sharma

Reusswig

et al. 2008

Journal of Non-Crystalline Solids

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“…Another approach is to increase the absorption coefficient of the absorber material by alloying silicon with germanium. Matsui et al introduced the usage of microcrystalline silicon germanium alloys (μc-SiGe:H) with increased absorption coefficient compared to μc-Si:H [4,5].…”

Section: Introductionmentioning

confidence: 99%

Effects of process parameters onμc - Si_{1 − X}Ge_X:H solar cells performance and material properties

et al. 2015

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On our way to develop a very thin and highly efficient triple-junction thin-film solar cell in a-Si:H/µc-Si:H/µc-SiGe:H configuration and µc-SiGe:H single cell samples were prepared and characterized using an industrial relevant 13.56 MHz 0.5 nm/s process on an industrial like 30 × 30 cm 2 PECVD tool. To attain a better understanding of the µc-SiGe:H absorber we varied process pressure, germane flow, dilution and silane flow while looking at the electrical and material properties. By realizing a total absorber thickness less than 2 µm for high efficiency cell concepts in triple technology, our intention is to develop an industrial relevant process with attractive fabrication times by benefiting from the enhanced absorption of µc-SiGe:H compared to µc-Si:H.

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Microcrystalline silicon–germanium alloys for solar cell application: Growth and material properties

Cited by 39 publications

References 6 publications

Surface Plasmon Enhancement of Optical Absorption in Thin-Film Silicon Solar Cells

Surface Plasmon Enhancement of Optical Absorption in Thin-Film Silicon Solar Cells

Transport properties of nanocrystalline silicon and silicon–germanium

Effects of process parameters onμc - Si_{1 − X}Ge_X:H solar cells performance and material properties

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Microcrystalline silicon–germanium alloys for solar cell application: Growth and material properties

Cited by 39 publications

References 6 publications

Surface Plasmon Enhancement of Optical Absorption in Thin-Film Silicon Solar Cells

Surface Plasmon Enhancement of Optical Absorption in Thin-Film Silicon Solar Cells

Transport properties of nanocrystalline silicon and silicon–germanium

Effects of process parameters onμc - Si1 − XGeX:H solar cells performance and material properties

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Effects of process parameters onμc - Si_{1 − X}Ge_X:H solar cells performance and material properties