Microchannel heat sinks for two-dimensional high-power-density diode laser arrays

Abstract-This paper demonstrates the use of poly(dimethylsiloxane) (PDMS), polyurethane (PU), epoxy, and poly(methyl methacrylate) (PMMA) as mandrils to fabricate metallic heat exchangers having 300-700 m internal channels. The mandrils were prepared using two soft lithographic techniques-replica molding, and microembossing. To fabricate the heat exchangers, the polymeric mandrils were coated with a thin layer of metal by thermal evaporation or sputtering; this layer acted as the cathode for electrodeposition of a shell of nickel or copper that was 100 m thick.

show abstract

“…[4]. Generally, the temperature of unidirectional flow heat exchangers, including our structures, varies by 2 C across the heat source surface.…”

Section: B Performance Of the Thermal Modulesmentioning

confidence: 97%

Fabrication of metallic heat exchangers using sacrificial polymer mandrils

Arias

Oliver

et al. 2001

J. Microelectromech. Syst.

View full text Add to dashboard Cite

show abstract

“…Researchers such as Missaggia et al [9], Patel et al [10], and Benett et al [11] have been examining the use of MCCs for laser diode arrays since the late 1980s. Missaggia et al [9] experimentally investigated the use of a parallel MCC for dissipating heat from a twodimensional diode laser array.…”

Section: Introductionmentioning

confidence: 98%

Fluid and thermal analysis of a microchannel electronics cooler using computational fluid dynamics

Dix

Jokar

2010

Applied Thermal Engineering

View full text Add to dashboard Cite

“…We used a dicing saw to cut microchannels into the bottom of the Si heat sink [58,60]. Figure 10, a photomicrograph of the sawed cross section of a portion of an actual hybrid array, shows a linear array mounted in an etched groove in a microchannel Si heat sink.…”

Section: Two-dimensional Surface Emitting Arrays Ofgaas/aigaas Diode mentioning

confidence: 99%

“…Theoretical calculations [55][56][57] and experimental results [58,60] indicate that with a reasonable cooling- of the Si heat sink) and that the microchannels themselves can be treated as having an effective heat transfer coefficient h eff "2. 20 W/cm 2 _ 0 C. The hybrid devices reported here have their linear laser arrays mounted junction side up, which adds to the CW thermal resistance.…”

Section: Two-dimensional Surface Emitting Arrays Ofgaas/aigaas Diode mentioning

confidence: 99%

“…The device consists of linear arrays of edge-emitting lasers with conventional cleaved end facets mounted in grooves with flat bottoms and 45°sidewalls etched in a Si substrate. The substrate contains microchannels [53][54][55][56][57][58][59][60] for the flow of cooling fluid; the microchannel cooling provides an efficient means of removing high average dissipated powers. The eu bar on top of each linear array provides high electrical conductivity along the array and transient heat sinking during pulsed operation.…”

Section: Hybrid Surface-emitting Arraysmentioning

confidence: 99%

See 1 more Smart Citation

Two-Dimensional Surface-Emitting Arrays Of GaAs/AlGaAs Diode Lasers

et al. 1989

View full text Add to dashboard Cite

• Hybrid and monolithic two-dimensional surface-emitting arrays of GaAs/AlGaAs diode lasers have been designed and fabricated. The hybrid devices consist oflinear arrays ofedge-emitting graded-index: separateconfinement-heterostructure singIe-quantum-well (GRIN-SCH-SQW) lasers mounted on a Si substrate containing integral 45°deflecting mirrors and microchanneIs for the flow ofcooling fluid. With this design, CW output powers~120 W/cm 2 have been achieved. For quasi-CW operation (150-j.lSec . 2 pulses), peak output powers greater than 400 W/cm appear to be achievable.Two types of monolithic arrays-the first of edge-emitting lasers with ex:ternalcavity deflecting mirrors adjacent to the laser facets and the second with intracavity 45°deflecting mirrors-have also been fabricated and tested.A RRAYS OF SEMICONDUCTOR diode lasers are of .great interest for applications that require power levels higher than single devices can attain. Development efforts to date have concentrated mainly on linear arrays of edge-emitting GaAs/AlGaAs lasers [1-6]; these efforts have met with considerable success. Higher pulsed output power can be achieved by stacking and bonding these arrays to form composite twodimensional arrays that are often referred to as rack-andstack arrays [7][8][9][10][11]. Unless the stacking density is low; however, thermal considerations generally limit the maximum pulse repetition rate to less than 100 Hz.An alternative to such composite arrays are monolithic two-dimensional arrays that consist of surfaceemitting lasers. Several types of surface-emitting GaAs/AlGaAs and GaInAsPlInP diode lasers have . been demonstrated, including lasers with resonant cavities that are normal to the surface (i.e., vertical-cavity lasers) [12][13][14][15][16][17], lasers that incorporate total-iriternalreflecting 45°mirrors in the laser cavity [18-25J, and lasers that utilize a second-order grating to achieve emission normal to the surface [26][27][28][29]. During the past several years, researchers have made substantial progress in developing all of the above monolithic surface-emitting techniques. In particular, although they still suffer from high series resistance and low power efficiency, vertical-cavity lasers that utilize epitaxially grown high-reflectivity quarter-wave stacks [30] to define the laser cavity have become an exciting area ofresearch. Another approach to fabricating monolithic two-dimensional arrays is to couple edge-emitting diode lasers with external mirrors that deflect the radiation from the laser facets by 90° [21,23,[31][32][33][34][35][36][37][38][39]. At Lincoln Laboratory, Z.L. have fabricated such arrays of devices that combine a GaInAsP/InP laser with a parabolic deflector adjacent to one or both facets. The facets and deflectors are formed by selective chemical etching followed by a mass-transport process [31,40,41). Because a similar mass-tiansport process is not available for AlGaAs, other techniques such as ion-bearn-assisted etching (IBAE) [22,42--45], modified IBAE [46,47], reactive ion et...

show abstract

Microchannel heat sinks for two-dimensional high-power-density diode laser arrays

Cited by 104 publications

References 14 publications

Fabrication of metallic heat exchangers using sacrificial polymer mandrils

Fabrication of metallic heat exchangers using sacrificial polymer mandrils

Fluid and thermal analysis of a microchannel electronics cooler using computational fluid dynamics

Two-Dimensional Surface-Emitting Arrays Of GaAs/AlGaAs Diode Lasers

Contact Info

Product

Resources

About