1998
DOI: 10.1007/3-540-69544-3_2
|View full text |Cite
|
Sign up to set email alerts
|

Micro Total Analysis Systems: Microfluidic Aspects, Integration Concept and Applications

Abstract: In this contribution three aspects of miniaturized total analysis systems (mTAS) are described and discussed in detail. First, an overview of microfabricated components for fluid handling is given. A description of the importance of sampling-and fluid-handling techniques is followed by details of microvalves, micropumps and micro flowchannels. Secondly, the problems associated with system integration are discussed. As a solution for the realization of microfluidic-and micro analysis systems, the concept of a p… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1

Citation Types

0
102
0
3

Year Published

1999
1999
2017
2017

Publication Types

Select...
7
2

Relationship

0
9

Authors

Journals

citations
Cited by 195 publications
(105 citation statements)
references
References 41 publications
0
102
0
3
Order By: Relevance
“…With the use of previously formed labels a photolithography process is carried out in order to obtain the topology of the plate's surface as a whole, in particular lines for scribing and membranes etching masks are formed. In the membrane area on the non-planar side of the plate the monocrystalline silicon is etched to [10][11][12][13][14][15][16][17][18][19][20] thickness, which is sufficient to provide mechanical strength to carry out further operations.…”
Section: Microsensormentioning
confidence: 99%
See 1 more Smart Citation
“…With the use of previously formed labels a photolithography process is carried out in order to obtain the topology of the plate's surface as a whole, in particular lines for scribing and membranes etching masks are formed. In the membrane area on the non-planar side of the plate the monocrystalline silicon is etched to [10][11][12][13][14][15][16][17][18][19][20] thickness, which is sufficient to provide mechanical strength to carry out further operations.…”
Section: Microsensormentioning
confidence: 99%
“…Thermal flow microsensors are used in Micro Total Analysis S which recently has been significantly developed [10].…”
Section: Introductionmentioning
confidence: 99%
“…[194] Hence, it is economically beneficial in processing or testing where minimal amounts of precious reagents are available. [195] Particularly when used for informatics rather than for product synthesis, MF reactors consume far less reagent than bulk systems to gather the same (and in most cases more) chemical information.…”
Section: Wwwadvancedsciencenewscom Wwwadvhealthmatdementioning
confidence: 99%
“…In early developments, materials well known from the conventional semiconductor industry, such as silicon and glass, were used [4]- [6]. However, the complexity of devices based on these materials and their associated fabrication techniques make integration into such systems difficult and costly.…”
mentioning
confidence: 99%