Articles you may be interested inImpact of the gas-surface scattering and gas molecule-molecule interaction on the mass flow rate of the rarefied gas through a short channel into a vacuum J. Vac. Sci. Technol. A 28, 1393 (2010); 10.1116/1.3504596Rarefied gas flow through a thin slit into vacuum simulated by the Monte Carlo method over the whole range of the Knudsen number Experimental and numerical modeling of rarefied gas flows through orifices and short tubes AIP Conf.A rarefied gas flow into vacuum through a tube of finite length is investigated over the whole range of gas rarefaction by the direct simulation Monte Carlo method. The nonequilibrium effects at the inlet and outlet of the tube have been considered by including in the computational domain large volumes of the upstream and downstream reservoirs. Results for the dimensionless flow rate and for the flow field are presented for a wide range of the gas rarefaction and for various values of the length to radius ratio in the range from 0 to 10. The influence of the gas-surface interaction model, as well as the effect of the intermolecular potential model on the gas flow, is examined. A good agreement has been obtained between the present numerical results and the corresponding experimental ones available in the literature.
Keywords:Thermal flow sensor Mass flow rate Heat and mass transfer Mass flow meter MEMS a b s t r a c t An analytical model of the thermal flow sensor has been developed. The results of analytical model application are utilized to develop a thermal flow microsensor with optimal functional characteristics. The technology to manufacture the microsensor is described. A prototype of the microsensor suitable to be used in the mass air flow meter has been designed. The basic characteristics of the microsensor are presented.
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