Prototype of calorimetric flow microsensor

Gas flow meter based on calorimetric flow microsensor

“…Flow meter tests prove the ability of highly accurate air flow rate measurements in 0 up to 60 kg/h range. A qualitative agreement was obtained between results of earlier developed analytical model [3] and present tests. Generally, obtained results are important for designing, manufacturing and optimizing gas flow meters.…”

“…Attention should be paid to that under low gas flow rate values the membrane temperature in the area of R7 resistor location (160 μm from membrane center) exceeds average heater temperature. The same result was obtained theoretically in [3] using developed analytical model. As model clearly shows, this effect was caused by non-uniform temperature profile in heater that heater temperature in area close to R7 significantly exceeds average heater temperature.…”

“…From the opposite side of the heater (area close to R6) temperature is noticeably lower than average temperature. Generally, a qualitative agreement between results of using analytical model [3] and test results (Fig.7) was reached. Figure 8 represents excessive temperature of resistors T R =T R -T amb as a function of mass air flow rate Q.…”

“…The study is a follow up of our previous research [3,4]. The article [4] reveals working principles of thermal flow sensors and a detailed review of current stage in study and development of thermal flow sensors is presented.…”

“…Heater and temperature sensitive elements, number of which can be two or more, are enclosed inside the membrane. The main result of the research [3,4] are the analytical model of the calorimetric flow sensor and a microsensor prototype with optimal functional and technological characteristics. Microsensor design enables subsequent device assembly and reliable operation.…”