Micro Magnetic Induction Machines for Portable Power Applications

Cros, F.; Arnold, David P.; Allen, Mark G.; Das, Subhro; Köşer, Hür; Lang, Jeffrey H.

doi:10.21236/ada463731

Cited by 3 publications

(5 citation statements)

References 6 publications

(5 reference statements)

Supporting

Mentioning

Contrasting

Order By: Relevance

“…This is the average force per unit area generated in the rotor by the electromechanical interactions. Although higher torque densities and shear stresses have been reported for electric induction machines [7,8], those results were obtained using spinning, not tethered rotors. It is believed that the performances of the machines reported here are limited by two fabrication issues.…”

Section: Discussionmentioning

confidence: 93%

“…This has driven the development of new compact, electric power sources in the 10-100 watt range for use in portable electronics, remotely located sensors, and robotic devices. One potential system, is a microengine [1,2]-a small (few cubic centimeters) gas-fueled turbine engine [3,4] coupled to an electrical power generator [5][6][7][8]. Such a system has the potential to reduce the mass, life-cycle costs, and cumbersome logistics of conventional batteries while providing uninterrupted high density power.…”

Section: Introductionmentioning

confidence: 99%

“…Both electric [5,6] and magnetic [7,8] induction machines have been investigated to convert the mechanical energy into electrical power, for use in a microengine. To achieve the desired power densities, the electrical generator must support high rotor spin (~1 Mrpm) and tip (500 m/s) speeds.…”

Section: Introductionmentioning

confidence: 99%

“…They also operate at lower voltages and higher currents and are therefore easier to integrate with typical electronic devices. The previously reported magnetic induction machines were fabricated using SU-8 micromolding and multi-level electroplating of various metals [7,8]. These first-generation devices successfully demonstrated electromechanical power conversion, but were not integrable with the silicon-based microturbines and were limited in temperature due to the presence of the SU-8 polymer.…”

Section: Introductionmentioning

confidence: 99%

See 3 more Smart Citations

Magnetic Induction Machines Embedded in Fusion-Bonded Silicon

Arnold¹,

Cros²,

Zana³

et al. 2004

Self Cite

View full text Add to dashboard Cite

This paper presents the design, fabrication, and characterization of laminated, magnetic induction machines intended for high-speed, high-temperature, high-power-density microengine power generation systems. Innovative fabrication techniques were used to embed electroplated materials (Cu, Ni 80 Fe 20 , Co 65 Fe 18 Ni 17 ) within etched and fusion-bonded silicon to form the machine structure. The induction machines were characterized in motoring mode using tethered rotors, and exhibited a maximum measured torque of 2.5 µN·m and a projected torque density of 340 N·m/m 3 .

show abstract

Section: Discussionmentioning

confidence: 93%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Magnetic Induction Machines Embedded in Fusion-Bonded Silicon

Arnold¹,

Cros²,

Zana³

et al. 2004

Self Cite

View full text Add to dashboard Cite

show abstract

“…The device has a maximum deflection angle of 9° at 1311 Hz. Moreover, the miniaturization of micro magnetic induction machines is designed for portable application with a micromachined of 1-mm-thick NiFe wafer for a non-laminar stator [ 142 ]. A method of pressing between Lithography, Electroplating, and Molding of Polymethylmethacrylate (LIGA PMMA) mold and NdFeB power composite is also alternative for forming a structure [ 143 ].…”

Section: Actuation Principlesmentioning

confidence: 99%

Scanning Micromirror Platform Based on MEMS Technology for Medical Application

et al. 2016

View full text Add to dashboard Cite

This topical review discusses recent development and trends on scanning micromirrors for biomedical applications. This also includes a biomedical micro robot for precise manipulations in a limited volume. The characteristics of medical scanning micromirror are explained in general with the fundamental of microelectromechanical systems (MEMS) for fabrication processes. Along with the explanations of mechanism and design, the principle of actuation are provided for general readers. In this review, several testing methodology and examples are described based on many types of actuators, such as, electrothermal actuators, electrostatic actuators, electromagnetic actuators, pneumatic actuators, and shape memory alloy. Moreover, this review provides description of the key fabrication processes and common materials in order to be a basic guideline for selecting micro-actuators. With recent developments on scanning micromirrors, performances of biomedical application are enhanced for higher resolution, high accuracy, and high dexterity. With further developments on integrations and control schemes, MEMS-based scanning micromirrors would be able to achieve a better performance for medical applications due to small size, ease in microfabrication, mass production, high scanning speed, low power consumption, mechanical stable, and integration compatibility.

show abstract