Magnetic Induction Machines Embedded in Fusion-Bonded Silicon

Arnold, David P.; Cros, F.; Zana, I.; Allen, Mark G.; Das, Subhro; Lang, Jeffrey H.

doi:10.31438/trf.hh2004.36

Cited by 2 publications

(2 citation statements)

References 9 publications

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“…Magnetic microelectromechanical systems (MEMS), such as motor/generators [1], pumps [2], valves [3], etc, require careful optimization of the magnetic and mechanical structures. In many cases, bulk micromachining of silicon can be used to fabricate complex, three-dimensional mechanical structures with stable and well-characterized mechanical properties.…”

Section: Introductionmentioning

confidence: 99%

“…For devices with time-varying magnetic fields, such as high-speed magnetic actuators [1][2][3] or integrated power conversion devices [4], one challenge is the minimization of frequency-dependent magnetic losses, resulting from hysteresis and eddy current effects. Hysteresis losses can be minimized by careful control of the ferromagnetic alloy composition and microstructure [5].…”

Section: Introductionmentioning

confidence: 99%

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Analysis and optimization of vertically oriented, through-wafer, laminated magnetic cores in silicon

Arnold

Zana

Allen

2005

J. Micromech. Microeng.

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This paper compares two fabrication methods for achieving through-wafer, laminated magnetic cores in silicon, intended for microfabricated magnetic devices where vertically oriented (normal to the wafer) magnetic laminations are required to reduce eddy current losses. Given certain fabrication constraints for each method, a theoretical framework is presented to permit the design of the optimal lamination scheme for a particular application. As an example, the analysis is applied to the optimization of laminations for a miniaturized synchronous permanent magnet motor/generator.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Analysis and optimization of vertically oriented, through-wafer, laminated magnetic cores in silicon

Arnold

Zana

Allen

2005

J. Micromech. Microeng.

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Multi-watt electpjc power from a microfabricated permanent-magnet generator

Das

Arnold²,

Zana³

et al.

18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005.

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1This paper presents the design, fabrication, and characterization of permanent-magnet (Phi) generators for use in microscale power generation systems. The generators are three-phase, axial-flux, synchronous machines, each consisting of a multi-pole surfacewound stator and PM rotor. The microfabricated windings, with small inter-conductor gaps and variable width geometry, are the key enabler for high power density. At a rotational speed of 120,000 rpm, one such generator demonstrates 2.6 W of mechanical-to-eIectcal power conversion and, coupled to a transformer and rectifier, delivers 1.1 W of DC electrical power to a resistive load. This Watt-scale electrical power generation demonstrates the viability of scaled PM machines for practical applications.0-7803-8732-5/05/$20.00 0 2005 IEEE.

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Magnetic Induction Machines Embedded in Fusion-Bonded Silicon

Cited by 2 publications

References 9 publications

Analysis and optimization of vertically oriented, through-wafer, laminated magnetic cores in silicon

Analysis and optimization of vertically oriented, through-wafer, laminated magnetic cores in silicon

Multi-watt electpjc power from a microfabricated permanent-magnet generator

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