Magnetic Induction Machines Embedded in Fusion-Bonded Silicon

Abstract

This paper presents the design, fabrication, and characterization of laminated, magnetic induction machines intended for high-speed, high-temperature, high-power-density microengine power generation systems. Innovative fabrication techniques were used to embed electroplated materials (Cu, Ni 80 Fe 20 , Co 65 Fe 18 Ni 17 ) within etched and fusion-bonded silicon to form the machine structure. The induction machines were characterized in motoring mode using tethered rotors, and exhibited a maximum measured torque of 2.5 µN·m and a projected torque density of 340 N·m/m 3 .