2013
DOI: 10.1088/0960-1317/24/1/013001
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Micro hot embossing of thermoplastic polymers: a review

Abstract: Micro hot embossing of thermoplastic polymers is a promising process to fabricate high precision and high quality features in micro/nano scale. This technology has experienced more than 40 years development and has been partially applied in industrial production. Three modes of micro hot embossing including plate-to-plate, roll-to-plate and roll-to-roll have been successively developed to meet the increasing demand for large-area patterned polymeric films. This review surveys recent progress of micro hot embos… Show more

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Cited by 202 publications
(158 citation statements)
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References 180 publications
(206 reference statements)
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“…22 For materials with low glass transition temperatures, this process enables fast processing using little energy.…”
Section: Shellac As a Thermoplastic Materialsmentioning
confidence: 99%
“…22 For materials with low glass transition temperatures, this process enables fast processing using little energy.…”
Section: Shellac As a Thermoplastic Materialsmentioning
confidence: 99%
“…In particular, during the last 10 years, these replication methods have contributed to the large progress in microand nanofabrication fields. 2,10,11 The elastomer polyIJdimethylsiloxane) (PDMS) has become one of the most widely used materials in the development of microfluidic devices in academic environments. 1,3,8,12 The popularity of PDMS materials originates from a number of factors, most importantly, the relatively cheap and easy prototyping of small numbers of devices with soft lithography using master molds for structure replication.…”
Section: Introductionmentioning
confidence: 99%
“…8 Current research in integrated optics and photonics focuses on the fabrication of embedded systems in thin polymer foils including waveguides as well as illumination and sensing elements. 9 Such structures are commonly fabricated by means of hot-embossing processes for microstructuring of substrate layers 10,11 with the claimed benefit that the processes can be upscaled to a roll-to-roll approach. Usually, to obtain embedded waveguides, a trench is created in a substrate in an initial embossing process.…”
Section: Introductionmentioning
confidence: 99%