Micro-Assembly Technologies and Applications

Ratchev, Svetan; Koelemeijer, Sandra

doi:10.1007/978-0-387-77405-3

Cited by 6 publications

(1 citation statement)

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“…This station enables the manipulation of generic components of RFS-MOB using active microgripper associated to a robotic micro-assembly system. Active gripping ensures reversible locking systems (which are not possible with passive gripping) and a fine control of tasks like [14]. For the precise control of position and the alignment of optical path, the 3D micro-assembly station comprises of 8 degrees of freedom (DOF) arranged into 2 manipulators with a vision system.…”

Section: Introductionmentioning

confidence: 99%

Frontiers of Assembly and Manufacturing

Lee

Suárez

Choi³

2010

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Micro-assembly has been identified to be a critical technology in the microsystems technology and nanotechnology. Increasing needs of MOEMS (Micro-Opto-Electro-Mechanical Systems) for microsystems conducts to development of new concepts and skilled micro-assembly stations. This paper presents a 3D microassembly station used for the reconfigurable free space micro-optical benches (RFS-MOB) which are a promising type of MOEMS. Designed parts of RFS-MOB are assembled by using the developed micro-assembly station. The flexibility of the micro-assembly station provides the possibility to manipulate a variety of microcomponents. The RFS-MOB design enables to reduce adhesion forces effects during releasing operations. Experimental results are shown and validate the effectiveness of the micro-assembly station and micro-assembly strategies.

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Section: Introductionmentioning

confidence: 99%

Frontiers of Assembly and Manufacturing

Lee

Suárez

Choi³

2010

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Utilisation of FIB/SEM Technology in the Assembly of an Innovative Micro-CMM Probe

Smale

Haley

Segal

et al. 2010

Precision Assembly Technologies and Systems

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The measurement of features from the micro-and precision manufacturing industries requires low uncertainties and nano-scale resolution. These are best delivered through ultra precise co-ordinate measuring machines (CMMs). However, current CMMs are often restricted by the relatively large and insensitive probes used. This paper focuses on the assembly challenges of a novel micro-CMM probe. The probe is comprised of a 70 µm glass sphere, attached to a solid tungsten-carbide shaft of diameter less than 100 µm, joined to a piezoelectric flexure structure. The assembly requirements are for positional accuracy of ± 0.5 μm, angle between the shaft and flexure of 90° ± 0.29° and that the components be undamaged by the process. A combined Focused Ion Beam and Scanning Electron Microscope machine (FIB/SEM) with integrated nanoresolution manipulators was used. The investigation has evaluated potential assembly and joining solutions, identified modifications to existing equipment and product design and produced a set of prototypes.

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