2010
DOI: 10.1007/978-3-642-14116-4
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Frontiers of Assembly and Manufacturing

Abstract: Micro-assembly has been identified to be a critical technology in the microsystems technology and nanotechnology. Increasing needs of MOEMS (Micro-Opto-Electro-Mechanical Systems) for microsystems conducts to development of new concepts and skilled micro-assembly stations. This paper presents a 3D microassembly station used for the reconfigurable free space micro-optical benches (RFS-MOB) which are a promising type of MOEMS. Designed parts of RFS-MOB are assembled by using the developed micro-assembly station.… Show more

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