2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems &Amp; Eurosensors XXXIII (TRANSDUCERS &Am 2019
DOI: 10.1109/transducers.2019.8808292
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Method for Strong Parylene-C Bonding to Surfaces Containing Gold and Silicon Dioxide

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“…Before deposition of the next 2-µm PaC passivation layer, silanization was done with A-174 silane to facilitate adhesion. [73] An anti-adhesive layer consisting of a 5% micro-90 aqueous solution was spin-coated before the deposition of the third PaC layer. The antiadhesive layer was formed by spin-coating at a rate of 1000 rpm and baking at 80 °C for 5 min to enhance uniformity.…”
Section: Methodsmentioning
confidence: 99%
“…Before deposition of the next 2-µm PaC passivation layer, silanization was done with A-174 silane to facilitate adhesion. [73] An anti-adhesive layer consisting of a 5% micro-90 aqueous solution was spin-coated before the deposition of the third PaC layer. The antiadhesive layer was formed by spin-coating at a rate of 1000 rpm and baking at 80 °C for 5 min to enhance uniformity.…”
Section: Methodsmentioning
confidence: 99%