Metal electrode integration on macroporous silicon: pore distribution and morphology

Abstract

In this work, a new approach for the one-step integration of interdigitated electrodes on macroporous silicon substrates is presented. Titanium/gold interdigitated electrodes are used to pattern p-type silicon substrates prior the anodization in an organic electrolyte. The electrolyte characteristics, conductivity, and pH have been found to affect the adherence of the metal layer on the silicon surface during the electrochemical etching. The impact of the metal pattern on size distribution and morphology of the resulting macroporous silicon layer is analyzed. A formation mechanism supported by finite element simulation is proposed.

The Mechanism of Metal-Assisted Etching of Silicon

“…However, for porous silicon, such a situation is not realized. It was established that for porous silicon, Φ b is only weakly dependant on Φ M , and, as shown previously, the material parameters of porous silicon are more important factors affecting the properties of the M-PSi contacts (Scheen et al 2012;Skryshevsky 2014). Therefore, I-V characteristics differ significantly from the ideal behavior and the more general I-V relation with the ideality factor (n) is applicable.…”

The fabrication and surface functionalization of porous metal frameworks – a review

“…These electrodes are of particular interest for chemical, water vapour or gas sensing 265,266 , as lower detection limits can be achieved 10,11,193,264 and for electro-analytical chemistry, where rates of reactions are interface dependant 267,268 . , and electro-spun metal webs 272,273 .…”

“…Porous nano-structured metal electrodes, exhibiting typical surface areas a few decades larger than similarly dimensioned planar electrodes, and consisting of either anisotropic or random pore distributions have received considerable attention in recent years. 264 These electrodes are of particular interest for chemical, water vapour or gas sensing, 265,266 as lower detection limits can be achieved 10,11,193,264 and for electro-analytical chemistry, where rates of reactions are interface dependant. 267,268 Porous metal actuators have also been produced by metal foaming.…”