MEMS versus MOMS from a systems point of view

Abstract

A review of MEMS (micro electro mechanical systems) and MOMS (micro opto mechanical systems) is presented, highlighting comparisons and contrasts in applying the respective technologies from a complete system viewpoint. Typical examples from each technology are described, including an outline of the principles of operation and important assessment criteria in choosing an appropriate technology for a particular application. Assessment factors include performance requirements such as accuracy and resolution in addition to media compatibility, of which operating temperatures/pressures, chemical attack and electromagnetic immunity are important considerations.

Diamond, Diamond-Like Carbon (DLC) and Diamond-Like Nanocomposite (DLN) Thin Films for MEMS Applications

“…The carbon materials which arises from the strong dependence of their physical properties of the ratio of www.intechopen.com sp 2 (graphite-like) to sp 3 (diamond-like) bonds. The amorphous carbon is a mixture of sp 2 , sp 3 and sp 1 sites with the presence of nitrogen and hydrogen. The nitrogen free carbon films are shown in Fig.…”

“…By this process in the beginning the surface preparation of the films is more important. This process start from cleaning of the wafer for remove the moisture, baked the wafer, increase the adhesion promotion of the wafer by apply hexamethyldisiloxane (HMDS), (CH 3 ) 3 -Si-NH-Si-(CH 3 ) 3 . The HMDS treatment can reduce the pressure to form the monolayer onto the surface of the wafer, causes the more hydrophobic of the wafer which prevents the moisture condensation.…”

“…MEMS are defined as miniature devices which combining with mechanical, electrical, optical, and biological fields to fabricate integrated circuits (IC) or other similar manufacturing devises. The applications of these MEMS technologies are in different vast areas, like biomedical, environmental, transportation, manufacturing, robotics, space sciences, computing systems etc [1][2][3][4][5]. Researchers have much expectation of these new frontier technologies after silicon-based microelectronic technologies.…”

Applications of SOI-based optical MEMS

“…Using purely optical signals has the big advantage, that the device performance is immune to electromagnetic interferences (EMI). [17] The optical source is an LED. The optical detection utilizes the partial and simultaneous light coupling from one source fiber into two output fibers.…”

Hybrid optical MEMS vibration sensor

“…Despite the popularity of capacitive and piezoresistive readouts, they suffer from serious drawbacks like technological complexity, limited range of displacement, or insufficient sensitivity [1] [2]. We present a feasibility study on a passive optical readout, where a movable Si structure and a glass wafer with a chromium pattern compose an inertia dependent optical aperture.…”