Diamond, Diamond-Like Carbon (DLC) and Diamond-Like Nanocomposite (DLN) Thin Films for MEMS Applications

Santra, Tuhin Subhra; Bhattacharyya, Tarun Kanti; Patel, Parind; Tseng, Fan‐Gang; Barik, Tarun Kumar

doi:10.5772/29671

Cited by 10 publications

(4 citation statements)

References 50 publications

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“…For comparison, let's consider the Young's modulus of 1.1 TPa obtained in the literature [4][5][6] for a diamond membrane: the value of the bending rigidity of a 6 nm thick membrane, without built-in stress, calculated using Eq. (1) This remark do not allow for a conclusion related to the Young's modulus of the Ni/DLC composite material, as Young's modulus is a bulk property.…”

Section: Results Analysismentioning

confidence: 99%

“…For MEMS applications, DLC has been mainly identified as a good candidate for coating layers [5] due to its low roughness that reduces friction between mobile parts. Furthermore, the Young's modulus of some carbon materials has been reported to range from a few tens of MPa to more than 1 TPa, depending on thickness and atom arrangement [6][7][8].…”

Section: Introduction and Objectivesmentioning

confidence: 99%

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Implementation and mechanical characterization of 2 nm thin diamond like carbon suspended membranes

Ghis

Sridi

Delaunay

et al. 2015

Diamond and Related Materials

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Ultrathin diamond like carbon (DLC) layers with thickness down to 2 nm have been integrated into suspended membranes enabling their mechanical properties to be characterized. The goal of this study is the integration of a membrane with micrometric suspended area into operational MEMS. The early structure for feasibility study of a device is made of a membrane suspended above a micrometer sized cavity. Deflection is electrostatically induced by applying an electric potential between the membrane and the floor of the cavity. The thickness of the membrane determines at first order the amplitude of the deflection. Experimental measurements are presented and results obtained discussed. The experimental bending rigidity value is extracted and is shown to be a key parameter for modeling membrane's behavior in any other mechanical embodiment. DLC is identified as a suitable material for free standing over a micrometer large area, even when only a few nanometers thick, and a promising candidate for MEMS integration.

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Section: Results Analysismentioning

confidence: 99%

Section: Introduction and Objectivesmentioning

confidence: 99%

Implementation and mechanical characterization of 2 nm thin diamond like carbon suspended membranes

Ghis

Sridi

Delaunay

et al. 2015

Diamond and Related Materials

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“…Тонкие пленки, такие как a-C и ta-C (состоящие из аморфного углерода с преобладающей долей s p 2 -связей и s p 3 -связей соответственно [1]), представляют большой интерес, так как могут применяться в качестве защитных покрытий [2], элементов наноэлектромеханических систем [3], мемристоров [4], для оптических приложений [5] и в других областях. Изменяя параметры получения углеродных пленок, можно управлять их фазовым составом, что позволяет в значительной мере влиять на конечные физические свойства [5].…”

Section: Introductionunclassified

Удельное электросопротивление тонких углеродных пленок с различной долей sp-связей

Завидовский¹,

Стрелецкий²,

Нищак³

et al. 2020

Журнал Технической Физики

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The technique of ion-plasma pulse-arc sputtering of graphite in a methane atmosphere has been employed to produce carbon films with different phase composition. Raman spectroscopy and transmission electron microscopy showed that increase of methane concentration in the vacuum deposition chamber leads to the growth of fraction containing sp-hybridized chains. In the investigated films structure, resistivity strongly correlates with the content of sp-hybridized carbon.

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“…Very small surface roughness can reduce the friction and the wear rate in microstructure component during operations. This allows improving the lifetime of details [6].…”

Section: Introductionmentioning

confidence: 99%

The Deposition of Silicon-Carbon Coatings in Plasma Based Nonself-Sustained Arc Discharge with Heated Cathode

Grenadyorov

Оскомов

Solovyev

et al. 2016

KEM

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Silicon-carbon coatings on silicon substrates were deposited in plasma based nonself-sustained arc discharge with heated cathode by plasma polymerization of silicon organic agent such as polyphenyl methylsiloxane (PPhMS). Silicon-carbon coatings were deposited at PPhMS flow rate of 0.012 ml/min, argon pressure of 0-0.1 Pa, discharge current of 5-8 A, discharge voltage of 130-150 V, and filament current of 68 A. Bipolar pulsed bias voltage was supplied on the substrate during coating deposition. Surface morphology, hardness and elastic modulus of silicon-carbon films were investigated after the deposition. The film surface is very smooth with root-mean-square roughness of 0.579 nm. Maximum hardness of coatings was 11 GPa, and maximum elastic modulus was 142 GPa.

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Diamond, Diamond-Like Carbon (DLC) and Diamond-Like Nanocomposite (DLN) Thin Films for MEMS Applications

Cited by 10 publications

References 50 publications

Implementation and mechanical characterization of 2 nm thin diamond like carbon suspended membranes

Implementation and mechanical characterization of 2 nm thin diamond like carbon suspended membranes

Удельное электросопротивление тонких углеродных пленок с различной долей sp-связей

The Deposition of Silicon-Carbon Coatings in Plasma Based Nonself-Sustained Arc Discharge with Heated Cathode

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