MEMS Tunable Diffraction Grating for Spaceborne Imaging Spectroscopic Applications

Muttikulangara, Sanathanan S.; Barański, Maciej; Rehman, Shakil; Hu, Liangxing; Miao, Jianmin

doi:10.3390/s17102372

Cited by 14 publications

(9 citation statements)

References 32 publications

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“…More recently, a suspended serpentine is employed as the grating structures that could be tuned through the comb drive actuators in a similar way, which was reported to be suitable for spaceborne applications. [128] The application of electrostatic actuation in constructing MEMS tunable gratings can also be found in Ref. [129,130].…”

Section: Mems Gratings With Tunable Pitchmentioning

confidence: 99%

MEMS gratings and their applications

Zhou

Lim

et al. 2021

International Journal of Optomechatronics

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Grating plays an essential role in various optical systems owing to its unique dispersion properties. In recent years, there is increasing demand to miniaturize optical systems for a wide range of field applications. Therefore, the integration of diffraction grating with MEMS technology provides an efficient way to build truly miniaturized optical systems. Till now, MEMS diffraction gratings have mainly been explored in two directions, namely MEMS scanning gratings and MEMS tunable gratings. MEMS scanning gratings are constructed with a variety of MEMS actuators to drive a grating platform to scan across the target, and they play a significant role in various scanning systems. Meanwhile, the dispersive properties of grating scanners make them attractive in wavelength sensing applications, including spectrometers and hyperspectral imaging systems. Tunable gratings typically employ MEMS actuators to dynamically change the diffraction properties, thus tuning its wavelength sensitivity for a specific application. Thus, this review will introduce these two types of MEMS gratings in detail and evaluate their efficiency and advantages in various fields.

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Section: Mems Gratings With Tunable Pitchmentioning

confidence: 99%

MEMS gratings and their applications

Zhou

Lim

et al. 2021

International Journal of Optomechatronics

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“…Since the diffraction angle is proportional to the wavelength according to the diffraction equation, the rays with different wavelengths in an incoherent beam are diffracted in different paths; and the diffracted patterns of the rays enable us to analyze the wavelength components of the incoherent beam. These diffraction grating properties apply to recent research to develop spectrometries and X-ray imaging systems [ 23 , 24 , 25 , 26 , 27 , 28 ].…”

Section: Geometries Of Diffraction Grating Imaging Considering Multiple Wavelengthsmentioning

confidence: 99%

Computational Three-Dimensional Imaging System via Diffraction Grating Imaging with Multiple Wavelengths

Jang

Yoo

2021

Sensors

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This paper describes a computational 3-D imaging system based on diffraction grating imaging with laser sources of multiple wavelengths. It was proven that a diffraction grating imaging system works well as a 3-D imaging system in our previous studies. The diffraction grating imaging system has advantages such as no spherical aberration and a low-cost system, compared with the well-known 3-D imaging systems based on a lens array or a camera array. However, a diffraction grating imaging system still suffers from noises, artifacts, and blurring due to the diffraction nature and illumination of single wavelength lasers. In this paper, we propose a diffraction grating imaging system with multiple wavelengths to overcome these problems. The proposed imaging system can produce multiple volumes through multiple laser illuminators with different wavelengths. Integration of these volumes can reduce noises, artifacts, and blurring in grating imaging since the original signals of 3-D objects inside these volumes are integrated by our computational reconstruction method. To apply the multiple wavelength system to a diffraction grating imaging system efficiently, we analyze the effects on the system parameters such as spatial periods and parallax angles for different wavelengths. A computational 3-D imaging system based on the analysis is proposed to enhance the image quality in diffraction grating imaging. Optical experiments with three-wavelength lasers are conducted to evaluate the proposed system. The results indicate that our diffraction grating imaging system is superior to the existing method.

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“…Although the usage of a prism for generating SPRs at the metal-dielectric interface is an obstacle in its miniaturization, it is used in biosensing devices due to its simple design and sensitivity to change in the refractive index caused by adsorption or desorption of molecules on its surface. On the other hand, grating-based SPRs have been extensively explored due to its miniaturization feasibility and wide range of applications like biosensing [83][84][85][86], solar cells [87], spectral imaging [88] and color filtering [89].…”

Section: Otto Configurationmentioning

confidence: 99%

Nanostructured Color Filters: A Review of Recent Developments

2020

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Color plays an important role in human life: without it life would be dull and monochromatic. Printing color with distinct characteristics, like hue, brightness and saturation, and high resolution, are the main characteristic of image sensing devices. A flexible design of color filter is also desired for angle insensitivity and independence of direction of polarization of incident light. Furthermore, it is important that the designed filter be compatible with the image sensing devices in terms of technology and size. Therefore, color filter requires special care in its design, operation and integration. In this paper, we present a comprehensive review of nanostructured color filter designs described to date and evaluate them in terms of their performance.

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MEMS Tunable Diffraction Grating for Spaceborne Imaging Spectroscopic Applications

Cited by 14 publications

References 32 publications

MEMS gratings and their applications

MEMS gratings and their applications

Computational Three-Dimensional Imaging System via Diffraction Grating Imaging with Multiple Wavelengths

Nanostructured Color Filters: A Review of Recent Developments

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