MEMs microswitch arrays for reconfigurable distributed microwave components

Bozler, C.O.; Drangmeister, R.; Duffy, S.M.; Gouker, M.A.; Knecht, J.M.; Kushner, Lawrence J.; Parr, R.; Rabe, S.; Travis, L.

doi:10.1109/aps.2000.875233

Cited by 17 publications

(25 citation statements)

References 7 publications

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“…Early research in this field focused on the demonstration of different voltage-actuated MEM switch geometries, such as metal contact [1]- [3] and capacitive contact [4], [5] devices. Several recent efforts [6], [7] have addressed one device characteristic relevant to circuit implementation: development of low actuation voltage devices.…”

Section: Introductionmentioning

confidence: 99%

MEM relay for reconfigurable RF circuits

Mihailovich

Kim

Hacker

et al. 2001

IEEE Microw. Wireless Compon. Lett.

142

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We describe a microelectromechanical (MEM) relay technology for high-performance reconfigurable RF circuits. This microrelay, fabricated using surface micromachining, is a metal contact relay with electrical isolation between signal and drive lines. This relay provides excellent switching performance over a broad frequency band (insertion loss of 0.1 dB and isolation of 30 dB at 40 GHz), versatility in switch circuit configurations (microstrip and coplanar, shunt and series), and the capability for monolithic integration with high-frequency electronics. In addition, this MEM relay technology has demonstrated yields and lifetimes that are promising for RF circuit implementation.

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Section: Introductionmentioning

confidence: 99%

MEM relay for reconfigurable RF circuits

Mihailovich

Kim

Hacker

et al. 2001

IEEE Microw. Wireless Compon. Lett.

142

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“…Electronic methods generally entail utilization of phase shifters and switches to realize the ability to reconfigure, while the optical method uses laser illumination to activate or de-activate portions of a printed phased array. Microelectromechanical (MEM) switches and phase shifters that are embedded within a printed phased array are the newest additions to the list of technologies used for implementing the ability to reconfigure [25].…”

Section: Reconfigurable Antennasmentioning

confidence: 99%

Reflectarray research at the communications research centre Canada

Shaker

Chaharmir

Cuhaci

et al. 2008

IEEE Antennas Propag. Mag.

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It has been a decade since a research program began on reflectarray technology at the Communications Research Centre Canada (CRC). This endeavor has demonstrated the advantages and shortcomings of this technology, the issues that ought to be addressed, and future opportunities. This paper summarizes the outcome of this research in the context of projects that have been carried out, and the resulting insight into reflectarray technology. Design methodology, fabrication process, and measurements results will be briefly discussed for each particular development.

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“…For this purpose, we have built an AlN piezoelectric MEMS switch [3]- [4]. Differently from all other actuation mechanisms like electrostatic [5]- [6], electromagnetic [7] and thermal [8], piezoelectric actuation gives us the advantage of being extremely linear in nature and requiring low power for actuation. Lead Zirconate Titanate (PZT) [9]- [10] and AlN [3]- [4] are the two most commonly used piezoelectric materials for realizing MEMS switches.…”

Section: Introductionmentioning

confidence: 99%

Demonstration of low voltage and functionally complete logic operations using body-biased complementary and ultra-thin ALN piezoelectric mechanical switches

Sinha

Jones

Guo

et al. 2010

2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS)

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This paper reports, for the first time, on the demonstration of low voltage and functionally complete logic elements (NAND and NOR) implemented by using body-biased complementary and ultra-thin (250 nm thick) Aluminum Nitride (AlN) based piezoelectric mechanical switches. This work presents, firstly, the importance of scaling AlN films for the demonstration of ultra-thin AlN switches and, secondly, the implementation of a new actuation scheme based on body biasing to lower the switch threshold voltage. Four of these ultra-thin switches were connected together to synthesize functionally complete MEMS logic gates (NAND and NOR) with a ± 2V swing and a body-bias voltage < 8 V. ©2010 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE. Disciplines Engineering | Mechanical EngineeringThis conference paper is available at ScholarlyCommons: http://repository.upenn.edu/meam_papers/258 DEMONSTRATION OF LOW VOLTAGE AND FUNCTIONALLY COMPLETE LOGIC OPERATIONS USING BODY-BIASED COMPLEMENTARY AND ULTRA-THIN ALN PIEZOELECTRIC MECHANICAL SWITCHESNipun Sinha, Timothy Jones, Zhijun Guo and Gianluca Piazza University of Pennsylvania, USA ABSTRACT This paper reports, for the first time, on the demonstration of low voltage and functionally complete logic elements (NAND and NOR) implemented by using body-biased complementary and ultra-thin (250 nm thick) Aluminum Nitride (AlN) based piezoelectric mechanical switches. This work presents, firstly, the importance of scaling AlN films for the demonstration of ultra-thin AlN switches and, secondly, the implementation of a new actuation scheme based on body biasing to lower the switch threshold voltage. Four of these ultra-thin switches were connected together to synthesize functionally complete MEMS logic gates (NAND and NOR) with a ± 2V swing and a body-bias voltage < 8 V.

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MEMs microswitch arrays for reconfigurable distributed microwave components

Cited by 17 publications

References 7 publications

MEM relay for reconfigurable RF circuits

MEM relay for reconfigurable RF circuits

Reflectarray research at the communications research centre Canada

Demonstration of low voltage and functionally complete logic operations using body-biased complementary and ultra-thin ALN piezoelectric mechanical switches

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