MEM relay for reconfigurable RF circuits

Abstract

We describe a microelectromechanical (MEM) relay technology for high-performance reconfigurable RF circuits. This microrelay, fabricated using surface micromachining, is a metal contact relay with electrical isolation between signal and drive lines. This relay provides excellent switching performance over a broad frequency band (insertion loss of 0.1 dB and isolation of 30 dB at 40 GHz), versatility in switch circuit configurations (microstrip and coplanar, shunt and series), and the capability for monolithic integration with high-frequency electronics. In addition, this MEM relay technology has demonstrated yields and lifetimes that are promising for RF circuit implementation.

Design and Fabrication of Rf-Mems Switch for v-Band Reconfigurable Application

“…Moreover, to eliminate the stiction problem between the bottom metal of cantilever and electrode, a thin layer of silicon nitride Si 3 N 4 is used to cover the electrode. An array of holes is created on the bottom metal to reduce the squeeze film damping [14] and to facilitate the final releasing step of fabrication. The contact resistance depends on the size of the contact area, the mechanical force applied, and the quality of the metal-to-metal contact.…”

Toggle switch: investigations of an RF MEMS switch for power applications

“…Since then, different types of switches for various applications were realized. They can be splitted into two groups, which base on capacitive coupling [4] and metal contacting [5][6][7].…”

Phase Noise Analysis of MEMS-Based Phase Shifters

“…Micro-electromechanical (MEMS) series and shunt switches have been recently used in many low-loss phase shifters circuits [1], [2], [3], [4], [5], [6]. The MEMS phase shifters are typically implemented using standard PIN diode or FET switch designs, except that the switching element is replaced by a MEMS switch.…”