Abstract:Abstract-The effect of Brownian noise on Micro-Electro-Mechanical (MEMS)-based circuits has been calculated for MEMS-based circuits (phase shifters, delay circuits). The calculations are done for capacitive shunt MEMS switches and metal-to-metal contact series MEMS switches. The phase noise due to Brownian motion is negligible for MEMS switches with k 10 N/m, g 0 > 2 µm, Q > 0.5, and f 0 50 kHz. It is also found that metal-to-metal contact series switches result in much less phase noise than standard capacitiv… Show more
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