MEMS composite porous silicon/polysilicon cantilever sensor for enhanced triglycerides biosensing

Abstract

A novel composite porous silicon/polysilicon microcantilever for biosensing applications with enhanced sensitivity is reported. It is fabricated by surface mi cromachining of polysilicon cantilevers followed by the formation of the surface porous layer after release by Reaction Induced Vapor Phase Stain Etch. The microcantilevers with porous surface layer are characterized by their morphology that exhibits a dual macro and nanostructure for very effective immobilization of biomolecules. The current w ork focuses on the fabrication of composite porous silicon/polysilicon microcantilevers, characterization of their morphology and demonstration of improved immobilization of enzymes resulting in enhanced sensing of triglycerides.

Variable width based stepped MEMS cantilevers for micro or pico level biosensing and effective switching

“…The normal TG concentration in human blood serum is 1.5 gm/l or 1.5×10 -3 gm/ml or 1.5×10 -6 gm/µl [1,12], which is equivalent to 1.754 mM or 1.754 µM or 1.754 pM, respectively. It implies that per µl of blood serum contains 10.559×10 14 TG molecules.…”

“…MEMS sensors are also utilized for TG [5] and glucose [6] detection. Potentiometric and amperometric type biosensors are also used for sensing purposes [1]. The inadequacy of multi agent and zerocharged particles detection facility makes these methods less effective for biosensing.…”

“…The inadequacy of multi agent and zerocharged particles detection facility makes these methods less effective for biosensing. Generally, for μM or pM level biosensing the conventional rectangular microcantilever based sensors are mainly used with the aim of biomolecule concentration or activities detection [1]. Due to their constant geometry and stiffness, these rectangular shaped microcantilever based sensors do not offer good response corresponding to lower mass loading on their surfaces.…”

“…The most widely used element in Bio-MEMS for biosensing and in RF-MEMS for RF switching is the microcantilever [1,2]. In bio-MEMS, molecular mass and concentration can be inspected by microcantilever based biosensor [3,4].…”

Enhanced crystallization on porous silicon: Facts and models

“…Such a nanostructured fractal surface has a great impact on the properties of different materials adsorbed or deposited on it. The enhanced immobilization of different molecules has been identified and used for various sensing applications [9][10][11].…”