Highly sensitive microcantilevers have most commonly and widely been adopted for Bio-MEMS and RF-MEMS applications. The µl and pl blood serums contain few triglyceride (TG) and glucose molecules. Hence, the conventional rectangular microcantilever sensors are not good enough to detect these small TG and glucose concentrations. In mM or µM level TG and glucose detection, the proposed variable sectional thickness based stepped beams showed nearly 3 to 5× more tip deflection then the conventional beam, while surface area, length and width of each beams were kept constant. In RF switching application by electrostatic actuation, the proposed stepped beam switches require less bias voltage for perfect switching and inferred less pull-in voltage requirement as the conventional switch. The mathematical models of proposed variable sectional thickness microcantilevers have also developed, which showed good agreement with simulation results.Index Terms-Microcantilever, in-vivo analysis, pull-in voltage
High performance and sensitivity of a microcantilever beam is much demanded in biosensing and needs accurate measurement of tip deflection under very low range of analyte adhesion. Constant geometry based rectangular microcantilevers are not good enough for micro or pico level triglyceride (TG) and glucose detection. With the same surface area, length and thickness, the proposed variable width based stepped microcantilever beams exhibit nearly twice or thrice more tip deflection corresponding to the same TG and glucose molecular pressure. With the less pull-in voltage requirement, such proposed stepped microcantilever beam based switches can be utilized in RF reconfigurable antenna for altering its operating frequency and radiation properties. Several configurations of proposed microcantilevers have been studied and analyzed for finding the optimal design with better deflection sensitivity. This paper also encompasses the mathematical modeling of proposed single and double stepped microcantilever beam, which exhibits good agreement with the simulation.
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