MEMS-based hemispherical resonator gyroscopes

Pai, Pradeep; Chowdhury, Faisal K.; Mastrangelo, Carlos H.; Tabib-Azar, Massood

doi:10.1109/icsens.2012.6411346

Cited by 23 publications

(23 citation statements)

References 7 publications

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“…Recently, some groups have succeeded in developing hemispherical wineglass resonators for rate integrating gyroscopes using hybrid MEMS fabrication techniques [5][6][7][8][9]. Despite successful demonstration of these hemispherical resonators they are prone to structural non-uniformities and asymmetries that arise due to non-uniformities in fabrication.…”

Section: Introductionmentioning

confidence: 98%

Magnetically coupled resonators for rate integrating gyroscopes

Pai

Pourzand

Tabib-Azar

2014

IEEE SENSORS 2014 Proceedings

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This work demonstrates for the first time the use of magnetic field to couple mechanical resonators that can be separated by long distances (8mm in this work) compared to coulombic/electrostatic coupling (~ 1 nm -1 μm depending on the surface charge density or E-field). The resonators were composed of electroplated copper cantilevers with proof-mass resulting in 1 kHz resonant frequency when uncoupled. The coupling magnetic field was produced by 1 mT rare earth magnets mounted on the resonators. Electrostatic actuation and sensing was used to excite and sense the collective motion of the coupled resonators. The radial motion of the resonators in the presence of an in-plane rotation gives rise to the Coriolis force. Thus, the rotation changes the rate of energy exchange between the coupled resonators enabling rate integrating gyros.

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Section: Introductionmentioning

confidence: 98%

Magnetically coupled resonators for rate integrating gyroscopes

Pai

Pourzand

Tabib-Azar

2014

IEEE SENSORS 2014 Proceedings

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“…The degenerate gyroscopes have an inherent mode matching, which improves the characteristic and increases the sensitivity of the devices. In recent years, more and more attentions have been attracted by the degenerate gyroscopes, including the ring vibrating gyroscopes (He and Najafi 2002; Najafi 2000, 2001) and the hemispherical resonator gyroscopes (Zotov et al 2012;Pai et al 2012;Cho et al 2013).This paper proposes a novel disk-like solid piezoelectric gyroscope based on the in-plane bulk acoustic wave (BAW) resonance. This design combines the solid piezoelectric gyroscopes with a disk-like resonant structure which is inherently mode matched.…”

mentioning

confidence: 94%

mentioning

confidence: 98%

A MEMS piezoelectric solid disk gyroscope with improved sensitivity

et al. 2014

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surface. This design deployed a bulk piezoelectric structure as an entire resonator without any other elastic structures, to increase the shock resistance, the energy conversion efficiency and decrease the fabrication complexity. However, the PZT material itself has the characteristic of low quality factor, low output signal and much mechanical noise, compared with the silica-based material. As a result, how to increase the output signal and the sensitivity is a hot topic for piezoelectric gyroscopes (Cheng et al. 2013).On the other hand, the development of the MEMS silicon vibrating gyroscopes shows that the mode matching is a valid solution to increase the output signal and sensitivity of the gyroscopes (Tanaka et al. 1995). The mode matching is to match the resonant frequency between the drive mode and the sense mode, and to eliminate the frequency split. In most of the vibrating gyroscopes, the exact calculation and design should be made to implement a good characteristic. The ring vibrating gyroscope is a kind of degenerate gyroscope (He and Najafi 2002), which has an inherent axial symmetric resonator and utilizes a degenerate vibration mode pair as the drive and sense modes to maximize the energy transfer between the two modes. The degenerate gyroscopes have an inherent mode matching, which improves the characteristic and increases the sensitivity of the devices. In recent years, more and more attentions have been attracted by the degenerate gyroscopes, including the ring vibrating gyroscopes (He and Najafi 2002; Najafi 2000, 2001) and the hemispherical resonator gyroscopes (Zotov et al. 2012;Pai et al. 2012;Cho et al. 2013).This paper proposes a novel disk-like solid piezoelectric gyroscope based on the in-plane bulk acoustic wave (BAW) resonance. This design combines the solid piezoelectric gyroscopes with a disk-like resonant structure which is inherently mode matched. The structure not only obtains the high shock resistance and energy conversion efficiency Abstract This paper introduces a MEMS piezoelectric solid disk gyroscope. The gyroscope operates in an inplane elliptic bulk acoustic wave mode with a frequency of 284 kHz. This gyroscope is an improvement of the solid piezoelectric gyroscope. A device, 6 mm in diameter, has been fabricated through the microelectromechanical systems process, and achieved a relatively high sensitivity and bias instability. In this paper, it is described that the design, fabrication, circuit system and characteristics of the piezoelectric solid disk gyroscope.

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“…Currently these two market sectors are dominated by two well-established optoelectronic angular velocity sensor technologies, i.e. the optical technology, with Ring Laser Gyroscopes (RLGs) [5,6] and Fiber Optic Gyroscopes (FOGs) [7]- [9], both based on the Sagnac effect [10], and the Hemispherical Resonator Gyroscopes (HRGs) [3,11] based on the Coriolis force.…”

Section: Introductionmentioning

confidence: 99%

“…The recently launched Alphasat telecommunications satellite uses this kind of gyroscope for the attitude determination and control [15]. The sensing element of an HRG is a quartz hemispherical resonator with extremely high quality factor, up to 26 million [11]. Driving electrodes are used to excite a standing wave in the rim of the hemispherical resonator.…”

Section: Introductionmentioning

confidence: 99%

Recent advances in miniaturized optical gyroscopes

Dell’Olio

Tatoli

Ciminelli

et al. 2014

JEOS:RP

109

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Low-cost chip-scale optoelectronic gyroscopes having a resolution ≤ 10 • /h and a good reliability also in harsh environments could have a strong impact on the medium/high performance gyro market, which is currently dominated by well-established bulk optical angular velocity sensors. The R&D activity aiming at the demonstration of those miniaturized sensors is crucial for aerospace/defense industry, and thus it is attracting an increasing research effort and notably funds.In this paper the recent technological advances on the compact optoelectronic gyroscopes with low weight and high energy saving are reviewed. Attention is paid to both the so-called gyroscope-on-a-chip, which is a novel sensor, at the infantile stage, whose optical components are monolithically integrated on a single indium phosphide chip, and to a new ultra-high Q ring resonator for gyro applications with a configuration including a 1D photonic crystal in the resonant path. The emerging field of the gyros based on passive ring cavities, which have already shown performance comparable with that of optical fiber gyros, is also discussed.

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MEMS-based hemispherical resonator gyroscopes

Cited by 23 publications

References 7 publications

Magnetically coupled resonators for rate integrating gyroscopes

Magnetically coupled resonators for rate integrating gyroscopes

A MEMS piezoelectric solid disk gyroscope with improved sensitivity

Recent advances in miniaturized optical gyroscopes

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