A theoretical investigation of silicon-on-insulator nanometer slot waveguides for highly sensitive and compact chemical and biochemical integrated optical sensing is proposed. Slot guiding structures enabling high optical confinement in a low-index very small region are demonstrated to be very sensitive to either cover medium refractive index change or deposited receptor layer thickness increase. Modal and confinement properties of slot waveguides have been investigated, considering also the influence of fabrication tolerances. Waveguide sensitivity has been calculated and compared with that exhibited by other silicon nanometer guiding structures, such as rib or wire waveguides, or with experimental values in literature.

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Guided-wave optical biosensors are reviewed in this paper. Advantages related to optical technologies are presented and integrated architectures are investigated in detail. Main classes of bio receptors and the most attractive optical transduction mechanisms are discussed. The possibility to use Mach-Zehnder and Young interferometers, microdisk and microring resonators, surface plasmon resonance, hollow and antiresonant waveguides, and Bragg gratings to realize very sensitive and selective, ultra-compact and fast biosensors is discussed. Finally, CMOS-compatible technologies are proved to be the most attractive for fabrication of guided-wave photonic biosensors.