Mechano-optical waveguide on–off intensity modulator

Abstract

High-extinction on-off modulators are essential for channel selection in integrated-optical sensor arrays. We report a standard SiON-technology-based electrostatically driven integrated mechano-optical waveguide on-off intensity modulator. On-off modulation is achieved by movement of an absorbing element into and out of the evanescent field of the guided mode. An extinction ratio of >37 dB at an actuation voltage of <30 V was achieved in a 6 mm x 4 mm device for a wavelength of 632.8 nm. Full wafer-scale fabrication is made possible by use of chemical mechanical polishing and aligned wafer bonding.

A new ATR-IR microreactor to study electric field-driven processes

“…This leads to an effect similar to the "nanomechanical integratedoptical effect" first described by Lukosz et al [49], which consists in the modulation of light transmittance through planar optical waveguides caused by moving an element (e.g., a dielectric) in the evanescent field of the guided light. The effect has, for example, been used in a microphone with optical read-out [50] and in a mechano-optical waveguide intensity onoff switch [51]. In the work of Lukosz et al changes in the width of the gap between element and waveguide of a few nanometer were found to induce measurable changes in the effective refractive index of a guided wave, which then leads to phase and/or amplitude modulation.…”

Failure mechanisms of pressurized microchannels: model and experiments

“…1 Cabot Microelectronics, Aurora, CA. 2 Corning, New York. Using an elastic adhesive contact model [22], [23], the normalized real contact area as a function of the dimensionless adhesion parameter can be found (Fig.…”

“…W AFER fusion bonding is an important technology for microelectromechanical systems, for instance, for the fabrication of pressure sensors [1] or mechanooptical modulators [2]. Therefore, extensive research related to the technology itself and the physical mechanisms behind it has been performed [3]- [8].…”

Electrostatically actuated mechanooptical waveguide ON-OFF switch showing high extinction at a low actuation-voltage

“…Devices based on phase modulation, such as a Mach-Zehnder-based switch [3], a Bragg-reflector-based wavelength-filter [4], [5] and an acoustooptical sensor [6]. Also electrostatically driven intensity ON-OFF switches using an absorbing element have been reported [5], [7], [8]. These devices perform an Manuscript received June 1, 1998; revised September 17, 1998.…”

“…Magel [5] reports on electrostatically driven devices fabricated with sacrificial etching techniques that show an extinction ratio of 17 dB at a voltage of 50 V and a response time of 0.5 s. Recently, we proposed and demonstrated the feasibility of an electrostatically driven ON-OFF intensity switch, which is fabricated using a two-wafer technique [7]. Due to the good control of the fabrication process, a device was obtained, showing a 37-dB extinction ratio at a 25-V driving voltage [8].…”