2000
DOI: 10.1016/s0026-2714(00)00004-4
|View full text |Cite
|
Sign up to set email alerts
|

Mechanisms of noise sources in microelectromechanical systems

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1
1

Citation Types

1
50
0

Year Published

2004
2004
2020
2020

Publication Types

Select...
6
3

Relationship

0
9

Authors

Journals

citations
Cited by 86 publications
(51 citation statements)
references
References 23 publications
1
50
0
Order By: Relevance
“…To do so, an estimate of the IMU orientation in the global reference frame is needed (Sabatini et al, 2005;Schepers et al, 2007). However, the procedure described above is complicated by a number of factors: (a) a drift is commonly present when integrating the accelerometer and gyroscope signals, mostly due to thermal-mechanical and electronic noise, introducing an error in the displacement estimations, which is nonlinearly related to the integration time (Djuric, 2000;Thong et al, 2004); (b) the determination of the IMU orientation with respect to the global reference frame from gyroscopic and accelerometer data is not trivial (Woodman, 2007) and (c) in the integration of the coordinate accelerations an estimate of initial velocity needs to be provided.…”
Section: Introductionmentioning
confidence: 99%
“…To do so, an estimate of the IMU orientation in the global reference frame is needed (Sabatini et al, 2005;Schepers et al, 2007). However, the procedure described above is complicated by a number of factors: (a) a drift is commonly present when integrating the accelerometer and gyroscope signals, mostly due to thermal-mechanical and electronic noise, introducing an error in the displacement estimations, which is nonlinearly related to the integration time (Djuric, 2000;Thong et al, 2004); (b) the determination of the IMU orientation with respect to the global reference frame from gyroscopic and accelerometer data is not trivial (Woodman, 2007) and (c) in the integration of the coordinate accelerations an estimate of initial velocity needs to be provided.…”
Section: Introductionmentioning
confidence: 99%
“…Djuri c [4] has made a detailed study of the mechanisms of noise sources in microelectromechanical systems (MEMS), concluding that the noise in an accelerometer can be modelled as coming from two sources: (i) thermal-mechanical noise and (ii) transistor noise, although it was also noted that more work is required for a full understanding. Pang and Liu [5] have looked at characterising the performance of a particular accelerometer when used in a robotic system.…”
Section: Introductionmentioning
confidence: 99%
“…The performance of BMDs is influenced by various noise generation mechanisms [19,20]. These mechanisms include noise in the readout circuits and the intrinsic cantilever noise.…”
Section: Noise In Bmdmentioning
confidence: 99%
“…As previously stated, a BMD can be regarded as a mechanical oscillator characterized by its resonant frequency x 0 and the Q-factor [19,20]. On the other hand, its operation is based on temperature increase induced by heat absorption which depends on thermal conductance of the structure, G th .…”
Section: Gas Pressure Influence On Bmd Performancementioning
confidence: 99%