A new approach to IR bimaterial detectors theory

Djurić, Z.; Randjelović, Danijela; Jokić, Ivana; Matovic, Jovan; Lamovec, Jelena

doi:10.1016/j.infrared.2006.07.001

Cited by 14 publications

(7 citation statements)

References 21 publications

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“…[70][71][72] or "A new approach to IR bimaterial detectors theory" by Djurić, et al [77]. A milestone in ORNL activities has been reached with the presentation of real room−temperature thermal images ob− tained with a bi−material cantilever FPA with a "quasi" 4f optical readout in 2006 [78,79].…”

Section: Oak Ridge National Laboratorymentioning

confidence: 99%

Microthermomechanical infrared sensors

Steffanson

Rangelow

2014

Opto-Electronics Review

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We present a state-of-the-art overview of microthermomechanical infrared sensor technology. The working principle of this sensor is based on a bi-material actuated micromechanical deflection, generated by an induced temperature rise due to incident infrared radiation absorption. In order to generate a thermal image the thermomechanical deflections of the freestanding microstructures are read by either capacitive, piezoresistive or optical means. Research and development activities in this field began in the early 1990s. The development of this technology within the last 20 years has resulted in innovations such as uncooled multiband infrared detection, high-speed infrared sensing and uncooled THz imaging. This paper outlines representative milestones of this technology and analyses important results of notable groups. Significant activities on capacitive and optical readout techniques of thermomechanical infrared arrays are presented. Furthermore the advantages of microthermomechanical infrared sensors over current well-established uncooled infrared technologies are summarized. In conclusion the latest developments of this technology offer a highly potential solution for a variety of important energy-saving, safety and security applications.

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Section: Oak Ridge National Laboratorymentioning

confidence: 99%

Microthermomechanical infrared sensors

Steffanson

Rangelow

2014

Opto-Electronics Review

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“…In general, cantilever noise includes contributions from intrinsic factors such as thermomechanical noise and temperature fluctuations and extrinsic factors such as environmental vibration and instrument noise [22]. Here, we consider only thermomechanical noise because it has been reported to be two orders of magnitude larger than the noise due to temperature fluctuations for low quality factor (Q ∼ 100) microcantilevers Downloaded by [University of Auckland Library] at 13:03 04 November 2014 [12].…”

Section: Modeling Cantilever Sensitivity and Noisementioning

confidence: 99%

Thermomechanical Sensitivity of Microcantilevers in the Mid-Infrared Spectral Region

Kwon

Wang

Park

et al. 2011

Nanoscale and Microscale Thermophysical Engineering

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This article reports the thermomechanical sensitivity of bimaterial cantilevers over a midinfrared (IR) spectral range (5-10 µm) that is critical both for chemical analyses via vibrational spectroscopy and for direct thermal detection in the 300-700 K range. A physicsbased model of cantilever bending was developed by including heat transfer to and within the cantilever, temperature-dependent cantilever bending, and cantilever and optical system IR characteristics. Detailed measurements of the optical system IR characteristics were used as inputs to the model, including Fourier transform infrared (FT-IR) spectral characterization of cantilever absorbance as well as characterization of the light source and monochromator. Mechanical bending sensitivity and noise were modeled and measured for six commercially available microcantilevers, which consist of either an aluminum film on a silicon cantilever or a gold film on a silicon nitride cantilever. The spectral sensitivity of each cantilever was measured by recording cantilever deflection when illuminated with IR light from a monochromator. Predictions of cantilever bending sensitivity and noise compare very well with measurements over the entire spectral range with no fitting parameters or normalization. The results are used to rank the cantilevers for their potential use in IR measurements.

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“…Various mechanisms are proposed for the thermal detectors. The typical devices are bolometers [5], thermopiles [6][7][8][9], bimetals [10][11][12][13][14], and diodes [15,16]. In addition to the above static detectors, the resonant IR detectors are investigated.…”

Section: Introductionmentioning

confidence: 99%

A novel infrared detector using highly nonlinear twisting vibration

Yamazaki

Ogawa

Kumagai

et al. 2014

Sensors and Actuators A: Physical

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A new resonant infrared (IR) detector is proposed. The twisting motion of the thin film torsion bar is first used. The resonant frequency gives the information of the temperature change of the moving element caused by IR absorption. The dynamic sensing using the electrostatic force can remove the drift without the heat generation. The large nonlinearity of the thin film torsion bar combined with the frequency measurement increases the advantage of the high sensitivity. The IR detector is fabricated by the surface micromachining using sub-m thick poly-Si film. Its structure consists of two parts. One is the thin film torsion bars and another is the bending center part. They can be basically designed separately. The center part has bi-layer structure to induce bending against the temperature increase caused by the IR absorption. One fabricated IR detector has the resonant frequency of about 35kHz and shows the sensitivity of 30Hz/K and the shifting ratio of 830ppm/K. This sensitivity is larger than the previously reported Si detectors. The shifting ratio is larger than devices including the high-frequency quartz and ZnO detectors.

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A new approach to IR bimaterial detectors theory

Cited by 14 publications

References 21 publications

Microthermomechanical infrared sensors

Microthermomechanical infrared sensors

Thermomechanical Sensitivity of Microcantilevers in the Mid-Infrared Spectral Region

A novel infrared detector using highly nonlinear twisting vibration

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