Mechanical Property Characterization of LPCVD Silicon Nitride Thin Films at Cryogenic Temperatures

Chuang, Wen-Hsien; Luger, T.; Fettig, Rainer K.; Ghodssi, Reza

doi:10.1109/jmems.2004.836815

Cited by 80 publications

(45 citation statements)

References 25 publications

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“…Hence, the temperature effect on the Young's modulus is roughly one order of magnitude larger than the effect of thermal expansion. The same is true, e.g., for silicon nitride with˛D 2:3 ppm/K and˛E 87 ppm/K [21]. The two mechanisms involved are acting in the opposite way.…”

Section: Stress Released Resonatorsmentioning

confidence: 76%

Responsivity

Schmid¹,

Villanueva²,

Roukes³

2016

Fundamentals of Nanomechanical Resonators

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A change of mass or temperature, or an applied force causes a response of a mechanical resonator. The response can, e.g., be a change in frequency or vibrational amplitude. The responsivity of a mechanical resonator is the linear slope of the response to a particular stimulant. In case of a sensor application, the responsivity to the input parameter to be measured should be maximal. However, the responsivity to other inputs, such as a change in ambient temperature, should be minimal in order not to cause an unwanted cross-response. In this chapter, the responsivities of micro and nanomechanical resonators to mass (distributed and point masses), forces, and temperature are discussed.

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Section: Stress Released Resonatorsmentioning

confidence: 76%

Responsivity

Schmid¹,

Villanueva²,

Roukes³

2016

Fundamentals of Nanomechanical Resonators

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“…The calculation assumes a SiN x membrane with residual tensile stress of 200 MPa and a Young's modulus of 300 GPa. 86,87 In these calculations of the maximum deflection under differential pressure, it was assumed that the membrane is able to withstand the pressure up to the maximum amount displayed in the plots. In reality, the membrane may fracture at some point as the pressure is increased.…”

Section: Thin-film Silicon Nitride Membranesmentioning

confidence: 99%

Through a Window, Brightly: A Review of Selected Nanofabricated Thin-Film Platforms for Spectroscopy, Imaging, and Detection

Dwyer

Harb

2017

Appl Spectrosc

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We present a review of the use of selected nanofabricated thin films to deliver a host of capabilities and insights spanning bioanalytical and biophysical chemistry, materials science, and fundamental molecular-level research. We discuss approaches where thin films have been vital, enabling experimental studies using a variety of optical spectroscopies across the visible and infrared spectral range, electron microscopies, and related techniques such as electron energy loss spectroscopy, X-ray photoelectron spectroscopy, and single molecule sensing. We anchor this broad discussion by highlighting two particularly exciting exemplars: a thin-walled nanofluidic sample cell concept that has advanced the discovery horizons of ultrafast spectroscopy and of electron microscopy investigations of in-liquid samples; and a unique class of thin-film-based nanofluidic devices, designed around a nanopore, with expansive prospects for single molecule sensing. Free-standing, low-stress silicon nitride membranes are a canonical structural element for these applications, and we elucidate the fabrication and resulting features-including mechanical stability, optical properties, X-ray and electron scattering properties, and chemical natureof this material in this format. We also outline design and performance principles and include a discussion of underlying material preparations and properties suitable for understanding the use of alternative thin-film materials such as graphene.

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“…[22][23][24] Dynamic measurement principles utilizing resonance frequency determination of vibrating thin films are also in use. [25][26][27] Other common methods rely on X-ray diffractometry 28,29 and Raman spectroscopy. 30,31 All these methods have their pros and cons.…”

Section: Introductionmentioning

confidence: 99%

“…36 However, it suffers from the same drawback as other resonant techniques because it requires knowledge of the mass density of the thin a) film which can differ considerably from bulk properties and is thus often also unknown. [25][26][27] This paper focuses solely on bulge testing because it is the most versatile method. In the context of elastomechanical thin film probing, the bulge test was first reported in 1959 by Beams.…”

Section: Introductionmentioning

confidence: 99%

A two-step load-deflection procedure applicable to extract the Young's modulus and the residual tensile stress of circularly shaped thin-film diaphragms

Beigelbeck

Schneider

Schalko

et al. 2014

Journal of Applied Physics

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We report on a novel two-step load-deflection (LD) formula and technique that enables an accurate extraction of the Young's modulus and the residual tensile stress from LD measurements on circularly shaped thin-film diaphragms. This LD relationship is derived from an adaptation of Timoshenko's plate bending theory, where the in-plane and out-of-plane deflections are approximated by series expansions. Utilizing the minimum total potential energy principle yields an infinitedimensional system of equations which is solved analytically resulting in a compact closed-form solution. In the appendant measurement procedure, the whole transverse bending characteristic of the diaphragm as a function of the radial coordinate is recorded for different pressure loads and introduced into the novel LD equation in order to determine the elastomechanical parameters of interest. The flexibility of this approach is demonstrated by ascertaining the Young's modulus and the residual tensile stress of two disparate diaphragm materials made of either micromachined silicon or microfiltered buckypapers composed of carbon nanotube compounds. V C 2014 AIP Publishing LLC.

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Mechanical Property Characterization of LPCVD Silicon Nitride Thin Films at Cryogenic Temperatures

Cited by 80 publications

References 25 publications

Responsivity

Responsivity

Through a Window, Brightly: A Review of Selected Nanofabricated Thin-Film Platforms for Spectroscopy, Imaging, and Detection

A two-step load-deflection procedure applicable to extract the Young's modulus and the residual tensile stress of circularly shaped thin-film diaphragms

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