Mechanical Properties of MEMS Materials

Stanimirovic, Z.; Stanimirovic, I.

doi:10.5772/7010

Cited by 11 publications

(9 citation statements)

References 4 publications

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“…There is a strong correlation between MEMS' performance and the mechanical properties of the materials they are constructed from. By selecting, designing, fabricating, and packaging materials in accordance with mechanical properties, some of the mechanical failure modes may be eliminated 58 . Polysilicon, the most frequently used MEMS material, has Young’s modulus mostly in the range between 160 and 180 GPa, similar to single-crystal silicon (160 – 190 GPa) 58 .…”

Section: Resultsmentioning

confidence: 99%

Revealing the static and dynamic nanomechanical properties of diatom frustules—Nature's glass lace

Cvjetinovic

Luchkin

Statnik

et al. 2023

Sci Rep

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Diatoms are single cell microalgae enclosed in silica exoskeletons (frustules) that provide inspiration for advanced hybrid nanostructure designs mimicking multi-scale porosity to achieve outstanding mechanical and optical properties. Interrogating the structure and properties of diatoms down to nanometer scale leads to breakthrough advances reported here in the nanomechanical characterization of Coscinodiscus oculus-iridis diatom pure silica frustules, as well as of air-dried and wet cells with organic content. Static and dynamic mode Atomic Force Microscopy (AFM) and in-SEM nanoindentation revealed the peculiarities of diatom response with separate contributions from material nanoscale behavior and membrane deformation of the entire valve. Significant differences in the nanomechanical properties of the different frustule layers were observed. Furthermore, the deformation response depends strongly on silica hydration and on the support from the internal organic content. The cyclic loading revealed that the average compliance of the silica frustule is 0.019 m/N and increases with increasing number of cycles. The structure–mechanical properties relationship has a direct impact on the vibrational properties of the frustule as a complex micrometer-sized mechanical system. Lessons from Nature’s nanostructuring of diatoms open up pathways to new generations of nano- and microdevices for electronic, electromechanical, photonic, liquid, energy storage, and other applications.

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Section: Resultsmentioning

confidence: 99%

Revealing the static and dynamic nanomechanical properties of diatom frustules—Nature's glass lace

Cvjetinovic

Luchkin

Statnik

et al. 2023

Sci Rep

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show abstract

“…(a) (b) Fig 1. (a) Schematic of a specimen in a supporting frame [4] and (b) polysilicon tensile specimen in a supporting single-crystal silicon frame [5] Resonant structure tests are being used for determination of elastic properties of MEMS devices. Different in-plane resonant structures or arrays of cantilever beams excited in different manners (e.g., by capacitive comb drives) are commonly being used (Fig.…”

Section: Testing Methodsmentioning

confidence: 99%

“…Nanoindenters are being used to apply load at the center of the membrane to provoke structural response in order to determine elastic behavior of the device. 2. (a) Shematic of crystal silicon cantilever microbeam that can be used in out-of-plane bending test [4] and (b) a diamond film cantilever microbeam deflected out of plane by a diamond stylus [5] Indentation tests are being used in force and displacement measurements. Penetration depths of nanoindenter are being used for determination of Young's modulus and strength of various thin films.…”

Section: Testing Methodsmentioning

confidence: 99%

Mechanical characterization of MEMS materials

Stanimirovic

2012

2012 28th International Conference on Microelectronics Proceedings

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“…These material properties can be classified as mechanical, electrical, chemical, thermal etc. These MEMS resonators are often used in extreme and hard environment, a virtuous knowledge is progressively imperative in eliminating some of reasons of device failure through proper material selection, design and method of fabrication [68]. Mechanical properties can be further categories into three forms.…”

Section: Materials Selectionmentioning

confidence: 99%

Si-based MEMS Resonant Sensor: A Review from Microfabrication Perspective

Verma¹,

Gupta²

2021

Preprint

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With the technological advancement in micro-electro-mechanical systems (MEMS), microfabrication processes along with digital electronics together have opened novel avenues to the development of small-scale smart sensingdevices capable of improved sensitivity with a lower cost of fabrication and relatively small power consumption. This article aims to provide the overview of the recent work carried out on the fabrication methodologies adoptedto develop silicon based resonant sensors. A detailed discussion has been carried out to understand critical steps involved in the fabrication of the silicon-based MEMS resonator. Some challenges starting from the materialsselection to the ?final phase of obtaining a compact MEMS resonator device for its fabrication have also been explored critically.

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Mechanical Properties of MEMS Materials

Cited by 11 publications

References 4 publications

Revealing the static and dynamic nanomechanical properties of diatom frustules—Nature's glass lace

Revealing the static and dynamic nanomechanical properties of diatom frustules—Nature's glass lace

Mechanical characterization of MEMS materials

Si-based MEMS Resonant Sensor: A Review from Microfabrication Perspective

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