MECHANICAL AND TRIBOLOGICAL BEHAVIOR OF VN AND HfN FILMS DEPOSITED VIA REACTIVE MAGNETRON SPUTTERING

Abstract

HfN and VN thin¯lms were deposited onto silicon and 4140 steel substrates with r.f. reactive magnetron sputtering by using Hf and V metallic targets with 4-inch diameter and 99.9% purity in argon/nitrogen atmosphere, applying a substrate temperature of 250 C and a pressure of 1:2 Â 10 À3 mbar. In order to evaluate the structural, chemical, morphological, mechanical and tribological properties, we used X-ray di®raction (XRD), transmission electron microscopy (TEM), energy dispersive X-ray analysis (EDX), atomic force microscopy (AFM), scanning electron microscopy (SEM), nanoindentation, pin-on-disc and scratch tests. Film structure determined by XRD showed that FCC (NaCl-type)¯lms are formed in both the cases by -HfN and -VN phases. Hardness and elastic modulus values obtained for both the¯lms were 21 and 224 GPa for the HfN¯lm and 19 and 205 GPa for the VN¯lm, respectively. Additionally, the¯lms showed low friction coe±cient of 0.44 for HfN and 0.62 for VN when these¯lms were evaluated against 100 Cr6 steel, and¯nally the critical load was found at 41 N for the HfN¯lm and 34 N for the VN¯lm.

Mechanical Properties and Oxidation Behavior of Multilayered Hf–Si–N Coatings

“…The Figure 4 illustrates the nanoindentation hardness and Young's modulus of the as-deposited multilayered Hf-N and Hf-Si-N coatings, which exhibit similar trends as varying the Si content. The hardness of the as-deposited Hf 54 N 46 coatings was 22.3 ± 0.6 GPa, which is comparable to the reported values of 19−21 GPa [4,29,30] for HfN films prepared through sputtering. Seo et al [3] reported a high hardness value of 25.2 GPa for epitaxial HfN(001) layers.…”

“…The group IVB (Ti, Zr and Hf) metal nitride coatings possess extraordinary characteristics of hardness [1][2][3][4], corrosion resistance [5][6][7] and decoration [8], but demonstrate inadequate oxidation resistance [9,10]. Ti-Si-N [11,12] and Zr-Si-N [13,14] have displayed enhanced oxidation resistance by Si addition.…”

HfN Coating of ASSAB 17 Steel by PVD Method and its Effects on 6063-T5 Aluminum Alloy Turning

“…Nevertheless, in either system, a surface contact trace is observed due to the trace that the chip left during its displacement on the attack surface, leaving steel residues [44,45]. This contact trace is more visible in the uncoated burin, due to self-lubricant layer resulting from the HfN coating which improves its performance in wear processes, as previously reported [25][26][27][28][29][30]33,[39][40]. Similarly, Fig.…”

“…Previous studies by Caicedo et al detailed the employed deposition process, the characterization of physical-chemical and mechanical properties of this coating, including coating thickness, hardness, roughness, chemical composition, phases in the structure, adhesion with the substrate material, corrosion resistance, wear resistance, and microstructural examinations [33,[39][40][41].…”