Mechanical and chemical properties of PBIID-treated plastics

Tonosaki, M.; Kitagawa, Koji; Takei, Y.

doi:10.1016/s0257-8972(02)00108-1

Cited by 5 publications

(2 citation statements)

References 3 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Since the invention of the PBII technique, about 20 articles have been published on PBII processing of polymers [48,124,[144][145][146][147][148][149][150][151][152][153][154][155][156][157][158][159].…”

Section: E Modification Of Polymer Surfacesmentioning

confidence: 99%

See 1 more Smart Citation

Plasma-based ion implantation and deposition: a review of physics, technology, and applications

Pelletier

Anders

2005

IEEE Trans. Plasma Sci.

169

View full text Add to dashboard Cite

After pioneering work in the 1980s, plasma-based ion implantation (PBII) and plasma-based ion implantation and deposition (PBIID) can now be considered mature technologies for surface modification and thin film deposition. This review starts by looking at the historical development and recalling the basic ideas of PBII. Advantages and disadvantages are compared to conventional ion beam implantation and physical vapor deposition for PBII and PBIID, respectively, followed by a summary of the physics of sheath dynamics, plasma and pulse specifications, plasma diagnostics, and process modelling. The review moves on to technology considerations for plasma sources and process reactors. PBII surface modification and PBIID coatings are applied in a wide range of situations. They include the by-now traditional tribological applications of reducing wear and corrosion through the formation of hard, tough, smooth, low-friction and chemically inert phases and coatings, e.g. for engine components. PBII has become viable for the formation of shallow junctions and other applications in microelectronics. More recently, the rapidly growing field of biomaterial synthesis makes used 1 of PBII&D to produce surgical implants, bio-and blood-compatible surfaces and coatings, etc.With limitations, also non-conducting materials such as plastic sheets can be treated. The major interest in PBII processing originates from its flexibility in ion energy (from a few eV up to about 100 keV), and the capability to efficiently treat, or deposit on, large areas, and (within limits) to process non-flat, three-dimensional workpieces, including forming and modifying metastable phases and nanostructures.We use the acronym PBII&D when referring to both implantation and deposition, while PBIID implies that deposition is part of the process.2

show abstract

Section: E Modification Of Polymer Surfacesmentioning

confidence: 99%

“…One publication deals with protective treatments against oxidative environments, and a recent one demonstrates its interest for the fabrication of micro-electrical mechanical systems, or MEMS [159].…”

Section: E Modification Of Polymer Surfacesmentioning

confidence: 99%