3D surface modification of micro trenched structure

Tonosaki, M.; Kato, Eiji; Yajima, Masami; Takei, Y.

doi:10.1016/j.vacuum.2004.01.066

Cited by 15 publications

(4 citation statements)

References 3 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The quality of the carbon film depends strongly on the preparation methods. Plasma-based ion implantation (PBII) is one of the appropriate methods to prepare such carbon films because it shows unique advantages [9,12]: less than 100 • C working temperature can prevent the film from graphitizing and getting loose and rough; alternate deposition and implantation can obtain smooth, compact and adhesive carbon film; all direction-implantation can avoid the line-of-sight behaviour of normal ion beam methods and thus is fit for complicated surfaces like grooves [13]; and high implanting voltage can offer high ion energy to transform sp 2 bonds into sp 3 ones [14].…”

Section: Introductionmentioning

confidence: 99%

The tribological properties of nanometre carbon films prepared by plasma-based ion implantation at various implanting voltages

Liao¹,

Tian²,

Li³

et al. 2007

J. Phys. D: Appl. Phys.

View full text Add to dashboard Cite

About 30 nm thick nanometre carbon films have been prepared on Si wafers by plasma-based ion implantation at various implanting voltages. The ball-on-disc sliding friction experiments show that the tribological properties of these carbon films are in good agreement with the corresponding structure characteristics which strongly depend on the implanting voltage. These structure characteristics include the film roughness, the film thickness, the C–Si transition layer between the carbon film and the Si substrate and the sp3/sp2 ratio. As the implanting voltage increases, the roughness and the thickness decrease, the C–Si transition layer thickens and the sp3/sp2 ratio first increases to the maximum value at about 30 kV and then decreases. 3 kV and below correspond to bad tribological properties owing to polymer-like carbon (PLC) film and no C–Si transition layer with poor adhesion to the Si substrate. When the implanting voltage increases to over 3 kV, a C–Si transition layer is gradually formed and thickens with increasing adhesion, and the PLC film is gradually turned into a diamond-like carbon (DLC) film, and hence the tribological properties are gradually improved and reach the best values at 30 kV. 10–50 kV correspond to two orders of increase in wear life, close to zero volume wear rate, but about 0.3 friction coefficient at 0.1 N applied load. With the increase in the applied load, the wear life and the friction coefficient decrease and the wear rate increases. For Si wafers coated with the DLC films at 30 kV, in the range of 0.5–1 N, there is an appropriate value corresponding to the wear life of above 18 000 s, friction coefficient of about 0.1 and wear rate of 10−9 mm3 N−1 m−1 level. Additionally, the wear mechanism is discussed.

show abstract

Section: Introductionmentioning

confidence: 99%

The tribological properties of nanometre carbon films prepared by plasma-based ion implantation at various implanting voltages

Liao¹,

Tian²,

Li³

et al. 2007

J. Phys. D: Appl. Phys.

View full text Add to dashboard Cite

show abstract

“…In addition, micro-channel made of polymer materials can reduce the cost and be used for disposable equipment. It inhabits continuous flow due to static friction and wear between the blood solution and the surface state of the polymer [5]. This causes the platelet in the blood adhesion and activation subsequently to thrombus formation then that is interfered by blood coagulation on channel surface [6].…”

Section: Introductionmentioning

confidence: 99%

Hemocompatibility of DLC coating for blood analysis devices

Shiba

Ohgoe

Hirakuri

et al. 2014

2014 International Conference on Electronics Packaging (ICEP)

View full text Add to dashboard Cite

The studies of Diamond-Like carbon (DLC) coated medical devices have reported possibility for developing blood analysis devices. DLC film is a surface modification technique for biomaterials due to their hemocompatibility, low friction, and reasonableness. We have deposited DLC film on silicon (Si), cyclic olefin polymer (COP), polycarbonate (PC), SU-8 and polydimethylsiloxane (PDMS) by using r.f. plasma enhanced chemical vapor deposition (r.f.-PECVD) method. These materials have been used extensively in microchannel devices. The hemocompatibility, chemical composition, structure, wettability, roughness, and surface morphology of the samples have been investigated by invitro test with sheep blood, X-ray photoelectron spectroscopy (XPS), Raman spectroscopy (Raman), a contact angle measurement, atomic force microscopy (AFM). The result indicated that the satisfied hemocompatibility was obtained for the DLC on COP and PDMS. Moreover, it was observed that hemocompatibility was influenced by surface conditions of sample DLC coating to COP and PDMS are expected as a surface modification technique for the micro-channel with hemocompatibility. Keywords-diamond-like carbon (DLC); hemocompatibility; micro fluidic device; micro channel; blood analysisI.

show abstract

“…Many methods have been applied to prepare DLC films. Plasma source ion implantation (PSII) and related methods have possibility to give high adhesion and good surface coverage for DLC films [1][2][3][4][5]. The electrical conductivity of DLC films prepared by PSII with a bipolar pulse was studied by Miyagawa et al [6].…”

Section: Introductionmentioning

confidence: 99%